If you're building instruments that demand high-resolution positioning—think semiconductor inspection, digital pathology, or precision metrology—then you already know that not all linear stages are created equal. Learn more about Ballscrew Actuators vs Belt Pulleys vs Linear Motors. The Parker mSR Series is built precisely for these applications.
This is not just a scaled-down version of a larger platform—it's a purpose-built, direct-drive linear positioner engineered for sub-micron repeatability, smooth motion, and clean multi-axis integration.
This is not just a scaled-down version of a larger platform—it's a purpose-built, direct-drive linear positioner engineered for sub-micron repeatability, smooth motion, and clean multi-axis integration.
Precision Options That Match Your Budget and Application
The mSR Series delivers two performance levels in the same form factor:
- The Precision Grade: Achieves 100-200 nm repeatability with 5-micron accuracy over 50 mm. Ideal for demanding tasks like laser processing or optical alignment.
- The Standard Version: Uses magnetic encoder technology to offer cost-effective performance, competing with screw-driven stages but without the wear, backlash, or maintenance.
In short, you're no longer forced to choose between budget and performance.
Encoder Choices For Every Need
Whether you’re designing for a microscope-based Z-axis or an X-Y gantry, the mSR comes in two optimized sizes:
- mSR80: Ironcore motor for higher force output in compact spaces.
- mSR100: Ironless motor for smoother, cog-free motion and reduced moving mass.
Both support a broad range of encoder options—optical (1 µm, 0.1 µm, 0.01 µm), BiSS-C absolute, analog sine/cosine, and magnetic (1 µm)—so you can dial in the resolution that matches your system and control architecture.
Engineered Details That Eliminate Guesswork
Valin’s mSR offering doesn’t stop at performance specs—it’s built for ease of integration and longevity:
- High-flex cabling as standard
- Integrated limit and home sensing (no extra wiring headaches)
- Tapped holes and dowel pinning for repeatable multi-axis builds
- Optional magnetic counterbalance for Z-axis use, a clean alternative to springs or pneumatics
All CE and RoHS compliant and available with cleanroom-friendly options.
Why Settle for Less?
Your application doesn’t need "good enough." With the Parker mSR, you get sub-micron precision, smooth motion, and cost-effective options—all in a compact, flexible platform supported by Valin’s expert application engineers.
Ready to build smarter, faster, and cleaner?
Learn more: mSR Series Linear Motor Stages from Parker
Contact us at (855) 737-4716 to schedule an engineering consultation or request a proof-of-concept demo or fill out our online form to learn more.