Tech1 is Benchmark Thermal's innovative heating solutions for the semiconductor manufacturing industry. Benchmark Thermal provides the semiconductor industry with a full complement of thermal components with heating solutions for complex and technical applications.
Features
Tech1 Semiconductor Heater Features
- Uniform or profiled heat throughout or in discrete zones
- Temperatures to 475°F (246°C)
- Temperature control through thermocouples or imbedded thermostats
- Overtemperature protection through thermostats or thermal fuses
- Control of surface temperature by insulation provides operator safety
- Nylon coated snaps for operator protection
- E-Z snap, self-adjusting jacket closure to provide a better fit and easier installation
- Clean room compatibility
- Foam molded parts for precision fit
- Stock and custom configurations
- Agency approvals and conformance to UL, CE, and NEC 427
Specifications
Tech1 Semiconductor Heater Specifications
Physical Specifications:
- For gas lines from 0.250” O.D. through 0.750” O.D.
- Available colors are Orange, Gray, and Green.
- Insulation Thickness 0.250”, 0.375”, or 0.500”.
- Maximum Temperature 475°F (246°C).
- Voltages from 12 volts to 240 volts (depending on amperage. Consult factory).
- Interconnect sections up to 10 amps.
- UL and CE marked and approved.
Electrical Specifications:
- Watt density from 1 to 5 watts per sq. inch.
- 12 Volts-240 Volts available. Consult the factory for amperage and resistance values.
- Positive mating connectors from Amp connectors, rated up to 10 amps.
- Heaters have power-in and power-out leads for interconnectability.
- Safety can be accomplished with thermostats, thermal fuses, and thermocouples, per customer design requirements.
Physical Properties:
- Jacket material: 0.028 cured silicone sheet, fiberglass reinforced.
- Fasteners are snap-style nylon-coated for operator protection
- Colors can be orange/red or gray.
Products
Tech1 Semiconductor Heater Products
Gas Line Heaters - Straight 0.250", 0.375", or 0.500" Diameter
- 2.5 watts per sq inch
- 0.250” thick insulation
- Power in and out leads 6”
- Amp Mate-N-Lok connectors
- With or without thermocouple 12”
- With or without control Thermostat
- U.L. recognized component
Insulators for Gas Line Components
- For 0.250” through 0.500” Diameter gas lines
- 0.250” thick insulation
- Silicone sheet material jacket
- Nylon-covered snaps for safety
1.5", 2.0", 3.0", and 4.0" Diameter Heater Lines
- All heaters are UL-recognized components.
- Heaters have standards of 0.25” silicone foam insulation. 0.50” insulation is also available.
- Heater jackets are made of fiberglass-reinforced silicone sheet material. Nylon-coated snaps are provided for greater operator protection.
- Type “K” thermocouple is available.
- Elbows and other shapes
- 90 Deg Radius
- 45 Deg Radius
- Conical Reducers
- Tee Heater
Supplemental Thermal Components
- ISO Clamp Heaters
- Continuous Shapes
- Valve Heaters
Special Application Heaters
Benchmark Thermal can produce a variety of configurations for special applications on a timely basis. Whether the application calls for:
- Block Manifolds
- Canisters
- Custom Application
Specialty Foam Products
- With extensive experience producing molded foam products, Benchmark is capable of providing customers with endless size and shape possibilities. Specialty foam is produced in the Benchmark facility from quality GE silicone sponge ingredients. Some of the key features of specialty foam include:
- Colors specific to the customer’s requirements.
- Design of the molded product can range from simple to very complex.
- Production run quantities can reduce overall cost.
- A high degree of uniform repeatability.
Q & A
Tech1 Semiconductor Heaters Q & A
+ What is the maximum temperature and temperature uniformity the heater can achieve?
Benchmark Thermal’s Tech1 semiconductor heaters can reach temperatures up to 475°F (246°C) and are available in both uniform and multi-zone configurations for precise temperature control. Uniformity and performance depend on the heater design, substrate material, and application setup. Embedded thermocouples or thermostats can be integrated for closed-loop temperature feedback. Customers are encouraged to request data on temperature uniformity under their specific operating conditions to ensure the heater meets process requirements.
+ Can the heater be customized for unique shapes, sizes, or temperature zones?
Yes. Benchmark Thermal offers both standard and fully customized semiconductor heaters. Each unit can be engineered to fit specific geometries, power densities, or multi-zone heating requirements. Customers can provide detailed application drawings, required temperature ranges, allowable tolerances, and environmental factors so that the engineering team can design a heater optimized for performance and reliability. Custom shapes and configurations for non-standard applications are routinely supported.
+ What safety features and insulation options are available?
Benchmark’s semiconductor heaters include multiple built-in safety and insulation features. Over-temperature protection can be achieved through thermostats or thermal fuses integrated into the design, while the outer jacket is made from fiberglass-reinforced silicone sheeting to ensure both electrical insulation and mechanical protection. The heaters are designed to maintain safe surface temperatures, even in high-heat applications, and use nylon-coated fasteners for operator safety. These materials are also suitable for cleanroom environments due to low outgassing and particulate generation.
+ What is the typical response time or heating rate?
Because the heaters are thin and lightweight, they exhibit fast thermal response times compared to conventional block or cartridge heaters. Actual ramp-up and cool-down rates depend on the specific design, substrate mass, and environmental heat losses. Customers can request transient thermal performance data or simulation results to confirm that the heater can achieve the desired ramp rates and temperature stability under real-world conditions.
+ What are the environmental or operating limitations?
Benchmark’s semiconductor heaters are compatible with cleanroom environments and are built from materials that resist most industrial conditions, including moderate vibration and humidity. However, users should evaluate exposure to aggressive chemicals, solvents, or mechanical stresses, which can shorten heater life. For applications involving high cycling, vacuum conditions, or contamination control, Benchmark can provide versions optimized for low outgassing, enhanced durability, and long-term reliability.
Downloads
Download Benchmark Thermal Tech1 Gas Line Heaters Datasheet
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