Malema’s LFC-7000 Series Ultrasonic Liquid Flow Controller combines an advanced ultrasonic flow sensor, control electronics with DSP signal processing and pinch valve to delivery accurate, repeatable, fast and tight flow control for slurry dispense application.
How it works:
Ultrasonic flow meter sends actual flow rate to the electronics.The electronics compares actual flow rate to required set point. The electronics sends a signal to the control valve to open or close to adjust actual flow rate to match set point.
Why Use Malema Ultrasonic Flow Controllers?
- Decreases the amount of slurry wasted during PM of peristaltic pumps:
- No need for PM except calibration at the introduction of new type of slurry: higher number of processed wafers with the same slurry consumption
- Peristaltic pumps and paddle wheel meters require frequent calibration and maintenance
- Peristaltic pump needs 15-20-minute break-in period for new tubing before calibration can take place
- High accuracy and reliability, stable dispense and minimal particle generation increase wafer yield with the same slurry consumption
- Improved yields (better polish results and less defects)
- Less defect count on processed wafers
- Alarms given to alert abnormal flow conditions
- Prevent scrapped wafers in advance
- Minimal false alarms due to flow control stability
- High accuracy low flow control down to ~2ccm
- Possibility of developing a low flow process recipe leading to slurry saving
- Ease of change over between different processes
- Faster start up is less downtime
CMP Tools: LFC Retrofit Options
The following CMP Tools can be retrofitted with Malema's LFC-7000 Series Ultrasonic Liquid Flow Controllers:
Learn more about
Malema's LFC-7000 Series Ultrasonic Liquid Flow Controllers.
Call us today at
(855) 737-4714 to learn more, or fill out our
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