Malema LFC-7000 Series Ultrasonic Liquid Flow Controllers

The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.

A typical module for high-accuracy control of ultrapure chemicals combines a Malema ultrasonic flowmeter, with accuracy rated at +/- 1% reading, with a Malema control valve. The ultrasonic flowmeter has an all PFA construction with no moving parts or seals. It sets a standard for flow measurement in terms of accuracy, repeatability, and purity. Its digital signal processing technology ensures reliable performance even with a certain degree of bubbles present in the process fluids. The high speed/precision motor actuated pinch valve (for slurries) or diaphragm valve (for chemicals) helps provide a fast and precise response with minimal “overshoot”. Its all PTFE (Polytetrafluoroethylene) construction and minimal dead volume ensure maximum process purity and reliability (chemical module).

LFC-7000 Series Ultrasonic Liquid Flow Controllers Features

• High Accuracy - Controls flowrate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications
• Fast Response 3 seconds (typically < 2 seconds for most applications)
• Broad application range with 2 types of control valves
• Wide range of flow control capability; 5 mL/min - 12000 mL/min (turndown can be as high as 100:1)
• All PTFE/PFA wetted part construction – insures compatibility with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
• Low maintenance - modules featuring ultrasonic flowmeters with NO moving parts provide the ultimate in “uptime” (slurry module with pinch tube replacement cycle of 3 years or longer)

Why Malema Ultrasonic Flow Controller?

Applications

• Semiconductor CMP Tools - Used to precisely control the flow of chemicals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems
• Wet Cleaning Tools – For accurate and reliable control of the blending and delivery of cleaning chemistries
• Copper Plating Tools – Well suited to chemical mixing and dispensing applications

Call us today at (855) 737-4714 to learn more, or fill out our online form and someone will get back to you.

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