22 Series Ultra High Purity Fluoropolymer Valves

Parker 22 Series Ultra High Purity Fluoropolymer Valves
These new ultra clean valves offer increased flow and provide better seat sealing for enhanced leak-free performance and greater safety. They are designed to deliver the highest flow in the smallest package available.

CFD software was utilized to maximize the flow through these valves. The 22 Series Valve is best suited for UHP chemicals, acids, plating, and slurry chemicals.


22 Series Ultra High Purity Fluoropolymer Valves Features:

  • Delivers high cycle life in acids and slurry with reduced maintenance
  • Compact footprint
  • Manual valve comes with a true lock-out, tag-out design
  • Optimized slurry design for maximimum cycle life
  • Dual point seal for slurry (patent pending)
  • Smooth bore, and fully swept path minimize particle entrapment areas
  • High flow in small package
  • 100% leak tested
  • Meets SEMI-F57-0301 standards

White Paper: Why Double the Seals has Double the Impact in Semiconductor Applications

Download Parker Series 22 UHP Fluoropolymer Valves Datasheet


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