In semiconductor manufacturing, FPD production, and optics inspection applications, the demand for nanometer-level motion control continues to increase. For OEM machine builders, meeting these precision requirements while maintaining efficiency and throughput is a significant challenge. NanoPWM™ from ACS Motion Control offers a groundbreaking solution by combining the best of linear and PWM amplifier technologies, enabling next-generation motion systems to achieve unparalleled accuracy and performance.
What is NanoPWM™?
NanoPWM™ is a proprietary motion control technology that overcomes the traditional limitations of amplifiers. While linear amplifiers have been the go-to choice for high-precision applications, their low power efficiency makes them less suitable for modern large-format motion stages. NanoPWM™ bridges this gap, delivering the dynamic range and linearity of linear amplifiers with the efficiency and power capabilities of PWM amplifiers.
Key Benefits of NanoPWM™
- Nanometer-Scale Precision: Achieves sub-nanometer standstill jitter of +/- 0.3 nm and nanometer-level following error at constant velocity (+/- 10 nm at 100 mm/sec).
- Unmatched Dynamic Range: Provides an industry-leading current control dynamic range exceeding 100 dB.
- Versatility: Ideal for precision mechanical-bearing and air-bearing stages.
- Digital Control Technology: Ensures easy setup, high reliability, and superior performance.
Why NanoPWM™ is Essential for High-Precision Applications
As the latest generation of semiconductor and optics equipment incorporates larger and more powerful motion stages to meet increasing throughput demands, traditional solutions fall short. NanoPWM™ provides the precision required for nanometer-resolution applications while maintaining the efficiency and reliability necessary for modern industrial systems.
Perfect for Cutting-Edge Applications
NanoPWM™ is uniquely suited for industries and applications that demand ultra-precise motion control, including:
- Semiconductor Manufacturing: Supports the nanometer-scale accuracy required for wafer inspection and processing.
- Flat-Panel Display (FPD) Production: Enables precision in large-format screen manufacturing.
- Optics and Photonics: Delivers the stability needed for intricate optical inspections and assembly.
Redefine Motion Control Precision
NanoPWM™ is the answer for OEMs striving to push the boundaries of precision while meeting the demands of modern manufacturing. By combining exceptional accuracy, high dynamic range, and efficiency, this technology empowers machine builders to deliver high-performance solutions for nanometer-resolution applications.
Have you explored how NanoPWM™ can elevate your motion systems to the next level? With its cutting-edge features and unparalleled precision, NanoPWM™ ensures your equipment is ready for the challenges of tomorrow.
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