Parker Veriflo's FR1000 Series ultra high purity, non-tied diaphragm, pressure reducing regulator provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many other point of use semiconductor manufacturing applications.
The standard Hastelloy C-22 diaphragm, and integrated filtration promotes long life performance while the metal-to-metal diaphragm seal assures high leak integrity.
FR1000 Series UHP Regulator Features:
- 316L stainless steel body
- Manufactured for ultra-high purity gas delivery applications
- Metal-to-metal diaphragm seal standard
- Passivated & electropolished
- Integrated filtration
- Hastelloy diaphragm standard
- 10 in. Ra surface finish
FR1000 Series UHP Regulator Markets:
- Semiconductor Manufacturing
- Gas Companies
- Analytical Laboratory
- Industrial
- Pharmaceutical
- BioPharm
Applications:
- Tool Hook Up
- Valve Manifold Boxes
- Process Gas Cabinets
- "Point of Use" Pressure Regulation
Download Parker Veriflo's FR1000 Series UHP Single Stage Pressure Reducing Regulator Datasheet
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FR1000 Series ultra high purity, non-tied diaphragm, pressure reducing regulator provides precise control of process gas.