Deposition Retrofit Solutions

Endura SVD Slit Valve Pneumatic Manifold Replacement for 0010-20052 & 0010-70297 

Endura SVD Slit Valve Pneumatic Manifold Replacement for 0010-20052 & 0010-70297
Endura SVD Slit Valve Pneumatic Manifold Replacement for 0010-20052 & 0010-70297

Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement for 0010-20052 & 0010-70297

The AC-150-2321 pneumatic EV manifold comes as a complete kit for ease of installation. Current Endura pneumatic EV manifolds 0010-20052 & 0010-70297 are up to 25 years old with potential Cv leakage and are obsolete. Valins drop-in pneumatic EV manifold replacement is a complete solution!  Learn more about Valin's Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement.

 

Endura TxZ Remote Gas Box Pneumatic ManifoldReplacement 

Endura TxZ Remote Gas Box Pneumatic ManifoldReplacement
Endura TxZ Remote Gas Box Pneumatic ManifoldReplacement

Endura TxZ Remote Gas Box Pneumatic EV ManifoldReplacement for 0190-43610

Valin has engineered a drop-in pneumatic EV manifold replacement that is a perfect solution for your obsolete TxZ remote gas box pneumatic EV manifold on your aging fleet of Endura 0190-43610 process tools. The AC-150-2473 pneumatic EV manifold comes as a complete kit for ease of installation. Learn more about Valin's Endura TxZ Remote Gas Box Pneumatic EV Replacement.

 

Endura Pallet Manifold Upgrade

Endura Pallet Manifold Upgrade 

Endura Pallet Manifold Upgrade
Endura Pallet Manifold Upgrade

The AC-150-2449 manifold comes as a complete kit for ease of installation with components for the Endura Pallet Manifold Upgrade. Fabs can reduce wafer scrap, eliminate air leaks, and improve wafer yield with this pneumatic manifold upgrade. Learn more about Valin's Endura Pallet Manifold Upgrade.

 

Centura Gas Box Pneumatic Manifold Replacement for 0190-09487 & 0190-02046 

Centura Gas Box Pneumatic Manifold Replacement for 0190-09487 & 0190-02046
Centura Gas Box Pneumatic Manifold Replacement for 0190-09487 & 0190-02046

Centura and Centura Ultima Gas Box Pneumatic EV Manifold Replacement for 0190-09487, 0190-02046, & 0190-01625

The AC-150-2444 pneumatic EV manifold comes as a complete kit for ease of installation. The AC-150-2444 replaces Centura pneumatic EV manifold part 0190-09487, 0190-02046, and 0190-01625 for both the lower gas box (Manifold 1) and upper gas box (Manifold 2). If an NF3 interlock is required, the AC-150-2466 NF3 Adaptor Kit can be added to the AC-150-2444 manifold kit. Learn more about Valin's Centura Gas Box Pneumatic EV Manifold Replacement.

 

Centura and Centura Ultima Chamber Pneumatic EV
Manifold Replacement for 0190-20124, 0190-20148, & 0010-01801

Centura chamber pneumatic manifold 0190-20124 0190-20148 AC-150-2463 

centura chamber pneumatic manifold 0190-20124 0190-20148 AC-150-2463
Centura chamber pneumatic manifold 0190-20124 0190-20148 AC-150-2463

The AC-150-2463 Centura Chamber and the AC-150-2459 Centura Ultima Chamber pneumatic EV manifolds come as a complete kit for ease of installation. These are 14 Station, 14 Valve Manifolds and replace the existing pneumatic EV manifolds. Each kit includes a pneumatic EV manifold with a LOTO On/Off control valve, mounting plate, PCB, and cable. As a complete drop-in solution, these are pneumatically, electrically, and physically compatible with the Centura and Ultima chamber assemblies. Both improve reliability and the larger valve Cv results in faster response times. Learn more about Valin's Centura and Centura Ultima Chamber Pneumatic EV Manifold Replacement.

 

Have questions? Email our technical specialists at semifab@valin.com or fill out the form below to have one of our technical specialists contact you to discuss your process issues related to Deposition Tools.  

 

 

 

Short description

Pneumatic EV Manifold Retrofit Kits