Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement


Valin has engineered a drop-in pneumatic manifold replacement that is a perfect solution for your obsolete gas box pneumatic manifolds on your aging fleet of Centura and Centura Ultima process tools. The AC-150-2444 pneumatic manifold comes as a complete kit for ease of installation.

Case Study: Semifab Reduces Wafer Scrap with Pneumatic Manifold Retrofit Kits

Case Study: Semi Fab Eliminates Air Leaks with Easy to Install Manifold Retrofit Kits

Article: Improving Yield through Upgraded Pneumatic Manifolds

Press Release: Valin Corporation Customers See Success with Pneumatic Manifold Retrofit Kits

Click here to request POE (Product on Evaluation) order.

Ask a Question about Endura TxZ Remote Gas Box Pneumatic Manifold Replacement

Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement for 0190-09487, 0190-02046 & 0190-01625 - Upgrade Benefits:

  • Replace entire Manifold in minutes
  • Current Manifold difficult to source
  • Replace individual valves in less than 5 minutes
  • Reduce Tool Downtime
  • Eliminate CDA leaks
  • Improve performance with larger Cv (.3) and higher flowrate (250 -300 l/min) for faster valve actuation
  • Reduce potential of wafer scrap due to leakage
  • Valves rated to 150 Million Cycles
  • The power consumption of each coil is 0.55w and a switching time of 8 ms
  • Drop in place solution (no holes to tap)
  • Units tested and fab approved

Clean, Simple Design

centura-gas-box-replacement-pneumatic-manifold-0190-09487-AC-150-2444

centura-gas-box-replacement-pneumatic-manifold-0190-09487-AC-150-2444

Valin AC-150-2444 Pneumatic Manifold

Valin's AC-150-2444 pneumatic manifold replaces Centura and Centura Ultima pneumatic manifold part 0190-09487, 0190-02046 & 0190-01625 for both the lower and upper gas box without NF3 interlocks.

Accessories & Spare Valves for Centura and Centura Ultima Gas Box Pneumatic Manifold

Valin Ported Exhaust Kit – Single, Part Number AC-150-2480

Valin Ported Exhaust Kit – Single, Part Number AC-150-2480

The Valin Single Ported Exhaust kit works with any manifold that includes the AVENITCS™ AV03 valves. The single kit changes the local ambient exhaust to a ported exhaust for manifolds with 1 ambient exhaust position. Shop Now


2x3/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0005

AVENTICS™ 2x3/2-directional Valve, Series AV03 Part Number AC-5VLV-0005
AVENTICS™ 2x3/2-directional valve, Series AV03, with spring return, NC, 24 VDC. The AV03 Series provide a reliable basis for both compact handling systems and complex automation solutions. Within machine safety the Series AV03 offers intelligent solutions that significantly reduce your effort in creating a safe design. With the integration of the fieldbus and I/O-modules of the Series AES, also all requirements for distributed control are available. Shop Now

AC-5VLV-0005 2x3/2-Directional Valve, Series AV03 Diagram






 

Centura gas box replacement pneumatic manifold 0190-09487 AC-150-2444 with nf3 interlock

For Applications with RTP (Rapid Thermal Processing) Chambers:

Adding the AC-150-2466 NF3 Interlock kit to Valin's AC-150-2444 Standard Gas Box Manifold can replace the Centura manifold part 0190-09487 (Rev A). This manifold enables the NF3 interlock circuits in the controls.


Valin Custom Valve for NF3 Interlock - Part Number AC-230-0793

Valin Custom Valve for NF3 Interlock - Part Number AC-230-0793

The custom AV03 valve includes a wire harness and connector used with the Valin NF3 Interlocks for Centura Gas Boxes equipped with the RTP Process chamber. Shop Now



Click here to request POE (Product on Evaluation) order.

Download Pneumatic Manifold Retrofit Kits Flyer
 

Centura Chamber Pneumatic Manifold Replacement

Have questions?

Contact our team of semiconductor technical specialists at (855) 737-4716, or email our team at manifold@valin.com to learn more.
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