Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement

Semiconductor fabs can now replace their obsolete pneumatic manifolds with Valin's tool qualified manifolds. Valin engineered a drop-in pneumatic manifold replacement that is a perfect solution for your obsolete gas box pneumatic manifolds 0190-09487, 0190-02046 & 0190-01625 on your aging fleet of Centura and Centura Ultima process tools. The AC-150-2444 pneumatic manifold comes as a complete kit for ease of installation. Fabs can reduce wafer scrap, eliminate air leaks and improve wafer yield with these new pneumatic manifold replacements.

We're so confident that this manifold will improve your wafer yield that we will send you a product to evaluate at no charge for 60 days.

Click here to request POE (Product on Evaluation) order. Stock is available and ready to ship!

Ask a question about Centura Pneumatic Manifold Replacement

Valin’s Pneumatic Manifold Retrofit Kits have been an absolute life saver for us.  Since upgrading to Valin’s manifold solution, we have had to change out four valves at separate times.  Without the ability to shut off the doors one at a time, we would have likely had four separate wafer scraps because of these four maintenance events.  However, with this new technology, that hasn’t been the case.  The solution is truly a home run not only in the hardware, but the procedural materials that instructed us how to install it.  Very easy and intuitive." 

Dave McGuire, NXP Semiconductors

Case Study: Semifab Reduces Wafer Scrap with Pneumatic Manifold Retrofit Kits

Case Study: Semi Fab Eliminates Air Leaks with Easy to Install Manifold Retrofit Kits

Article: Improving Yield through Upgraded Pneumatic Manifolds

Press Release: Valin Corporation Customers See Success with Pneumatic Manifold Retrofit Kits

Blog: Wafer Yield in the Semiconductor Industry

Centura and Centura Ultima Gas Box Pneumatic Manifold Replacement for 0190-09487, 0190-02046 & 0190-01625 - Upgrade Benefits:

  • Replace entire Manifold in minutes
  • Current Manifold difficult to source
  • Replace individual valves in less than 5 minutes
  • Reduce Tool Downtime
  • Eliminate CDA leaks
  • Improve performance with larger Cv (.3) and higher flowrate (250 -300 l/min) for faster valve actuation
  • Reduce potential of wafer scrap due to leakage
  • Valves rated to 150 Million Cycles
  • The power consumption of each coil is 0.55w and a switching time of 8 ms
  • Drop in place solution (no holes to tap)
  • Units tested and fab approved

Clean, Simple Design



Valin AC-150-2444 Pneumatic Manifold

Valin's AC-150-2444 pneumatic manifold replaces Centura and Centura Ultima pneumatic manifold part 0190-09487, 0190-02046 & 0190-01625 for both the lower and upper gas box without NF3 interlocks.

Spare Valves & Accessories for Centura and Centura Ultima Gas Box Pneumatic Manifold

Valin Ported Exhaust Kit – Single, Part Number AC-150-2480

Valin Ported Exhaust Kit – Single, Part Number AC-150-2480

The Valin Single Ported Exhaust kit works with any manifold that includes the AVENITCS™ AV03 valves. The single kit changes the local ambient exhaust to a ported exhaust for manifolds with 1 ambient exhaust position. Shop Now

2x3/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0005

AVENTICS™ 2x3/2-directional Valve, Series AV03 Part Number AC-5VLV-0005
AVENTICS™ 2x3/2-directional valve, Series AV03, with spring return, NC, 24 VDC. The AV03 Series provide a reliable basis for both compact handling systems and complex automation solutions. Within machine safety the Series AV03 offers intelligent solutions that significantly reduce your effort in creating a safe design. With the integration of the fieldbus and I/O-modules of the Series AES, also all requirements for distributed control are available. Shop Now

AC-5VLV-0005 2x3/2-Directional Valve, Series AV03 Diagram


Legris Mini Ball Valve – Part Number VLN-0549

Legris Mini Ball Valve
This Parker Legris 2-way ball valve is used as a shut-off for the Compressed Dry Air (CDA) supplied into the Pneumatic Manifolds used on the legacy SEMIFAB tools. For customers who are using traditional hemostats to pinch off the incoming supply line which isn’t easy to do in the confined spaces, these 2-way shut-off ball valves are the best solution. These ball valves don’t require any mounting and they can be connected inline to the supply CDA tubing. Shop Now

Centura gas box replacement pneumatic manifold 0190-09487 AC-150-2444 with nf3 interlock

For Applications with RPS (Remote Plasma Sources):

Adding the AC-150-2466 NF3 Interlock kit to Valin's AC-150-2444 Standard Gas Box Manifold can replace the Centura manifold part 0190-09487 (Rev A). This manifold enables the NF3 interlock circuits in the controls. Shop Now

Valin Custom Valve for NF3 Interlock - Part Number AC-230-0793

Valin Custom Valve for NF3 Interlock - Part Number AC-230-0793

The custom AV03 valve includes a wire harness and connector used with the Valin NF3 Interlocks for Centura Gas Boxes equipped with the RPS Process. Shop Now

Centura Chamber Pneumatic Manifold Replacement

Have questions?

Contact our team of semiconductor technical specialists at (855) 737-4716, or email our team at manifold@valin.com to learn more.
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When we needed technical assistance and applications support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.