Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement

Semiconductor fabs can now replace their obsolete pneumatic EV manifolds with Valin's tool qualified manifolds. These field proven manifolds are a drop-in replacement manifold that is a perfect solution for obsolete SVD (Slit Valve Door) pneumatic EV manifolds 0010-20052 & 0010-70297 on your aging fleet of Endura process tools. The AC-150-2321 pneumatic EV manifold comes as a complete kit for ease of installation. Fabs can reduce wafer scrap, eliminate air leaks and improve wafer yield with these new pneumatic EV manifold replacements.

We're so confident that these EV manifolds will improve your wafer yield that we will send you a product to evaluate at no charge for 60 days.

Click here to request POE (Product on Evaluation) order. Stock is available and ready to ship!

Ask a Question about Endura Pneumatic Manifold Replacement

Valin’s Pneumatic EV Manifold Retrofit Kits have been an absolute life saver for us.  Since upgrading to Valin’s manifold solution, we have had to change out four valves at separate times.  Without the ability to shut off the doors one at a time, we would have likely had four separate wafer scraps because of these four maintenance events.  However, with this new technology, that hasn’t been the case.  The solution is truly a home run not only in the hardware, but the procedural materials that instructed us how to install it.  Very easy and intuitive." 

Dave McGuire, NXP Semiconductors

Case Study: Semifab Reduces Wafer Scrap with Pneumatic EV Manifold Retrofit Kits

Case Study: Semi Fab Eliminates Air Leaks with Easy to Install Manifold Retrofit Kits

Article: Improving Yield through Upgraded Pneumatic EV Manifolds

Press Release: Valin Corporation Customers See Success with Pneumatic EV Manifold Retrofit Kits

Blog: Wafer Yield in the Semiconductor Industry

Endura SVD (Slit Valve Door) Pneumatic EV Manifold Replacement for 0010-20052 & 0010-70297 - Upgrade Benefits:

  • Proven in the field with Fab testing
  • Quick, easy installation (less than 45 minutes)
  • Fit, form, & function remains the same
  • 150 million valve cycle life expectancy
  • The power consumption of each coil is 0.8w and a switching time of 18 ms
  • Higher Cv (new valve .46 Cv compared to old valve .21 Cv)
  • Complete drop in replacement kit
  • No fabrication or other items needed
  • Ease of valve replacement (1 self-contained set screw and embedded gasket)
  • No loss of gaskets and screw
  • Individual valve isolation for servicing

Note: Full set of installation instructions printed on cleanroom paper included in kit (written by equipment engineers).

Clean, Simple Design


Current Endura pneumatic EV manifolds 0010-20052 & 0010-70297 are up to 25 years old with potential Cv leakage and are obsolete. All of the Endura Slit Valve Door pneumatic EV manifold kit installations completed by Valin to-date have resulted in significant yield improvements by preventing tool faults and shutdowns. Valin’s drop-in pneumatic EV manifold replacements are a complete solution!

Spare Valves & Accessories for Endura SVD (Slit Valve Door) Pneumatic EV Manifold

Series 501 Directional Control Valves - Part Number AC-5VLV-0004

AVENTICS™ Series 501 Directional Control Valves Part Number AC-5VLV-0004
The AVENTICS™ Series 501 is a line of general purpose automation valves designed for directional control and piloting applications requiring compact size, high flow capability, and energy savings. Engineers can achieve the flow of a 15 mm to 20 mm valve in a more compact package, saving space, cost, and energy in their machine designs.  In addition, no other valve in its class offers such a broad range of pressure regulator, pressure shut-off, and exhaust flow control accessories.  Shop Now

AC-5VLV-0004 Series 501 Directional Control Valves Diagram

Legris Mini Ball Valve – Part Number VLN-0549

This Parker Legris 2-way ball valve is used as a shut-off for the Compressed Dry Air (CDA) supplied into the Pneumatic EV Manifolds used on the legacy SEMIFAB tools. For customers who are using traditional hemostats to pinch off the incoming supply line which isn’t easy to do in the confined spaces, these 2-way shut-off ball valves are the best solution. These ball valves don’t require any mounting and they can be connected inline to the supply CDA tubing. Shop Now

Click here to request POE (Product on Evaluation) order. Stock is available and ready to ship!

Download Pneumatic Manifold Retrofit Kits Flyer

AC-150-2321 Valin Endura SVD Slit Valve 0010-20052 & 0010-70297 Replacement Manifold

Have questions?

Contact our team of semiconductor technical specialists at (855) 737-4716, or email our team at manifold@valin.com to learn more.
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When we needed technical assistance and applications support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.