Semiconductor Wet Etch and Clean Filters

Valin filters reduce particulates on wafers while cleaning and etching, filtering impurities. contamination on wafer surfaces during the cleaning and etching steps by creating a barrier that traps impurities. Valin filters and cartridges offer exceptional flow rates, on-stream life and chemical resistance, all in an efficient yet inexpensive contaminate filter.  
 

Chemflow XF

Chemflow XF:

The Chemflow-XF filter cartridge uses a superior asymmetric PTFE membrane which provides unmatched fow rates and on-stream life. It is constructed with HDPE supports providing an economical alternative to all-fluoropolymer cartridges while still maintaining a high degree of retention and cleanliness. This filter is ideally suited for bulk chemical delivery and lower temperature wet processes (<60°C). 

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Fluorocap Cartridge:

The Fluorocap encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical price. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. 

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Fluorocap Select CapsulesFluorocap Select Capsules:

The Fluorocap-SELECT encapsulated filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating that increases filtration area and flow by over 25% compared to our standard Fluorocap. This results in increased bath turnover and longer filter lifetime demanded by todays fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs.  

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Fluorocap XL Filter Capsule:

The Fluorocap-XL encapsulated filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases filtration area by over 70%. This results in increased bath turnover and longer filter life to meet the demands of todays advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C.  

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FluoroflowFluoroflow:

The Fluoroflow filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical cost. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150°C. It is available either ozone DI flushed and dried or wet packed for quick installation. 

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Fluoroflow-HSA:

The Fluoroflow-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow. This results in increased bath turnover and longer filter lifetime demanded by todays fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. 

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Fluoroflow-Select:

The Fluoroflow-SELECT filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating technology that increases filtration area and flow rate by over 70% versus our standard Fluoroflow. This results in increased bath turnover and longer filter lifetime demanded by todays fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. 

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Fluoroflow-XF:

The Fluoroflow-XF filter cartridge uses a superior asymmetric PTFE membrane which provides unmatched fow rates and on-stream life. Customers using the cartridge for viscous fluids like phosphoric acid, have reported flow rates and lifetimes more than twice that of the leading competitor. The advantages of increased bath turnover and longer lifetime improve yields while decreasing filtration costs.  

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Fluoroflow-XL:

The Fluoroflow-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter cartridge (3.25) combined with our unique SELECT pleating technology that increases filtration area and flow rate by over 70%. This results in increased bath turnover and longer filter lifetime demanded by todays advanced 300mm fabs. 

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Fluoroflow Filter CartridgeFluoroflow Filter Cartridge:

The Fluoroflow filter cartridge is an economical all-fluoropolymer product for wet etch and clean processes as well as certain high-purity chemical production applications. It provides good flow rates and on-stream life at an economical cost. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 150°C. It is available either ozone DI flushed and dried or wet-packed for quick installation. 

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Fluoroflow Select Filter Cartridge:

The Fluoroflow Select pleated membrane filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleat technology which increases filtration area and flow rate by over 70% versus our standard Fluoroflow. This results in increased bath turnover and longer filter life demanded by today's fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. 

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Short description

Valin filters reduce particulates on wafers while cleaning and etching, filtering impurities. contamination on wafer surfaces during the cleaning and etching steps by creating a barrier that traps impurities.