Parker Fluoroflow®-Select Cartridge

High Performance All-Fluoropolymer Cartridge for Aggressive Applications


The Fluoroflow®-SELECT filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating technology that increases filtration area and flow rate by over 70% versus our standard Fluoroflow®. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Benefits:

  • Large fltration area for longer life
  • High fow rates for increased bath turn over
  • Wet-pack option for quick installation
  • Ultraclean wet-pack option for absolute cleanliness
  • All-fuoropolymer for maximum chemical resistance
  • 100% integrity tested for consistent quality

Applications:

  • Wet etch and clean
    • Phosphoric acid
    • Sulfuric acid
    • Hydrof uoric acid
    • Nitric acid
    • Piranha – SC1,SC2
    • NMP-based solvents
  • Other high temperature or ozonated processes


Specifications:


Materials of Construction
100% Fluoropolymer construction
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area
6.0ft2 (0.56 m2) 4" (100mm) cartridge
12.2ft2 (1.1 m2) 10" (250mm) cartridge

Metals Extractables*
Standard: <20ppb (total)
Ultraclean: <5ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature

Forward:
80psid (5.5bar) @ 75ºF (24ºC)
55psid (3.8bar) @ 167ºF (75ºC)
30psid (2.0bar) @ 257ºF (125ºC)
15psid (1.0bar) @ 300ºF (150ºC)

Forward HT option:
100psid (6.8bar) @ 75ºF (24ºC)
75psid (5.1bar) @ 167ºF (75ºC)
50psid (3.4bar) @ 257ºF (125ºC)
15psid (1.0bar) @ 356ºF (180ºC)

Reverse:
50psid (3.4bar) @ 75ºF (24ºC)
15psid (1.0bar) @ 250ºF (121ºC)

Cleanliness (particle shedding)
Wet-packed: <2 particles/ml >0.2μm after 7gal @ 1gal/min
Dry-packed: <2 particles/ml >0.2μm after 12gal @ 1gal/min

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed without additional rinse-up.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.

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Download Parker Fluoroflow Select Cartridges Datasheet


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