GasPro™ TEM-3760 Series filters are designed for higher flow filtration of UHP semiconductor gases when an all-metal design is required. This all-welded assembly will deliver 3 nm particle retention where a good flow rate and low pressure drop is required and space is limited.
Nickel media is enclosed in a 316L stainless steel allwelded filter offers excellent bake-out characteristics for fast dry downs and in-line qualification.
Standard semiconductor industry fittings are offered for easy installation.
GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Features and Benefits
- Construction: Sintered Nickel fiber media enclosed in a 316L stainless steel housing.
- Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
- Out of package cleanliness: Porvair's GasPro™ TEM-3760 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
- Multiple fitting options for ease of installation: Standard fitting options include face/gasket seal, compression, butt weld and NPT. Special fittings, including tri-clamp (clover) sanitary and flange type,may be available upon request.
- 100% helium leak tested: All units are tested to 1x10-9 atm cc/second.
GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Specifications
- Filteration rating: Efficient 3 nm particle retention
- Maximum operating temperature: 200°C (392°F) in inert gas.
- Maximum operating pressure: 48.2 bar (700 psig) at 20°C (68°F).
GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Applications
- High flow delivery of Ultra-High purity corrosive gases, including semiconductor epitaxy and silicone water manufacturing.
Download Porvair GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Datasheet Talk to one of our filtration experts today at
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Download Porvair GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Datasheet
