GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter from Porvair

GasPro™ TEM-3760 Ultra-High Purity Nickel316L In-Line Filte
GasPro™ TEM-3760 Series filters are designed for higher flow filtration of UHP semiconductor gases when an all-metal design is required. This all-welded assembly will deliver 3 nm particle retention where a good flow rate and low pressure drop is required and space is limited.

Nickel media is enclosed in a 316L stainless steel allwelded filter offers excellent bake-out characteristics for fast dry downs and in-line qualification.

Standard semiconductor industry fittings are offered for easy installation.


GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Features and Benefits

  • Construction: Sintered Nickel fiber media enclosed in a 316L stainless steel housing.
  • Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
  • Out of package cleanliness: Porvair's GasPro™ TEM-3760 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
  • Multiple fitting options for ease of installation: Standard fitting options include face/gasket seal, compression, butt weld and NPT. Special fittings, including tri-clamp (clover) sanitary and flange type,may be available upon request.
  • 100% helium leak tested: All units are tested to 1x10-9 atm cc/second.

GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Specifications

  • Filteration rating: Efficient 3 nm particle retention
  • Maximum operating temperature: 200°C (392°F) in inert gas.
  • Maximum operating pressure: 48.2 bar (700 psig) at 20°C (68°F).

GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Applications

  • High flow delivery of Ultra-High purity corrosive gases, including semiconductor epitaxy and silicone water manufacturing.

Download Porvair GasPro™ TEM-3760 Ultra-High Purity Nickel-316L In-Line Filter Datasheet

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.

Engineered Solutions
A lesson for me is that I need to involve you earlier in the program.

You were tireless in your support and it will not be forgotten!

Valin Was There For Us
When we needed technical assistance and applications support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.