GasPro™ TEM-2100/3100 Series filters are designed for the filtration of semiconductor grade inert gases and CDA (clean dry air). This all-welded in-line multi-tube assembly will deliver 3 μm particle retention where high flow rate is required and space is limited.
These filter assemblies can easily be designed inside a cabinet, be placed under the cleanroom floor or anywhere in the subfab.
A PTFE membrane and polypropylene supported cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtered nitrogen for initial cleanliness.
GasPro™ TEM-2100/3100 High Flow PTFE In-Line Filter Assemblies Features and Benefits
- Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
- Out of package cleanliness: Porvair's GasPro™ TEM-2100/3100 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package particulate and chemical free cleanliness. Final assembly is purged with filtrated nitrogen for initial cleanliness. Additional preconditioning is optional.
- 100% helium leak tested: All units tested to 1x10-9 atm cc/second
GasPro™ TEM-2100/3100 High Flow PTFE In-Line Filter Assemblies Specifications
- Filtration Rating: Our porous PTFE filters provide efficient 3 nm particle retention.
- Maximum operating temperature:
- 80°C (176°F).
- Recommended changeout: 6 months when operating above 69ºC (156ºF).
- Maximum operating pressure: 17.2 bar (250 psig) @ 20°C (68°F).
- Maximum forward flow differential pressure
- 20ºC (68ºF): 6.0 bar (87 psi)
- 80ºC (176ºF): 4.0 bar (58 psi)
GasPro™ TEM-2100/3100 High Flow PTFE In-Line Filter Assemblies Applications
- General and process inert facilities gases for semiconductor, flat panel display, and other high-purity applications.
- Microelectronics clean dry air.
Download Porvair GasPro™ TEM-2100/3100 High Flow PTFE In-Line Filter Assemblies Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.
Download Porvair GasPro™ TEM-2100/3100 High Flow PTFE In-Line Filter Assemblies Datasheet
