Parker Veriflo FR Series Regulator

Introducing Parker Veriflo's FR Series Pressure Regulators! Parker's FR Series ultra-high-purity (UHP) Single Stage Pressure Regulators maintain precise, stable, and repeatable pressure control to meet today’s demanding semiconductor gas application requirements.

  • Precise control of process gases
  • Universal body design
  • NPT thread available
  • Available in fully configured gas sticks


Ideal for Semi Fab

  • Tool hookup
  • VMBs, VMPS, GIBs
  • Gas Cabinets
  • Bulk Specialty Gas Systems


FR1000 Series UHP Single Stage Pressure Reducing Regulator

  •  Non-tied diaphragm
  • CV: 0.09 / 0.15
  • Max Pressure: 300 / 3500 psig
  • Max Outlet: 150 psig
  • 10 Ra

Learn more about Parker Veriflo's FR1000 Series UHP Single Stage Pressure Reducing Regulator


FR1200 Series High-Flow Single Stage Tied Diaphragm Pressure Reducing Regulator

  •  Tied diaphragm
  • CV: 1.2
  • Max Pressure: 300 / 1700 psig
  • Max Outlet: 150 psig
  • 10 Ra

Learn more about Parker Veriflo's FRN1200 Series High-Flow Single Stage Tied Diaphragm Pressure Reducing Regulator


FR1300 Series UHP Single Stage Pressure Reducing Regulator 

  •  Non-tied diaphragm
  • CV: 1.2
  • Max Pressure: 600 psig
  • Max Outlet: 150 psig
  • 10 Ra

Learn more about Parker Veriflo's FR1300 Series UHP Single Stage Pressure Reducing Regulator 


FR1400 Series UHP High Flow Single Stage Pressure Reducing Regulator

  •  Tied diaphragm
  • CV: 0.5
  • Max Pressure: 300 / 3000 psig
  • Max Outlet: 150 psig
  • 10 Ra

Learn more about Parker Veriflo's FR1400 Series UHP High Flow Single Stage Pressure Reducing Regulator

 

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