Functional Safety Standards Drive Safety Related Control in Semiconductor Equipment

With mega fab construction accelerating around the globe, designers of new generation wafer processing equipment are following the lead of SEMI S2 and the European Machinery Directive by embracing functional safety standards like ISO-13849 for the design and integration of safety-related parts of control systems (SRP/CS) including the design of software. United Electric Controls (UE) and its Precision Sensors Division (PSI) are integral to this value chain designing pressure, temperature and flow sensors for use in Performance Level (PL) safety-related control. Eight UE/PSI products are certified for use in these safety-related systems. This pedigree of electrical, electronic or programable electronic devices are backed by FMEDAs, Functional Safety Assessments (FSAs) and SIL Certifications.

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