The FR1400 Series ultra high purity, pressure reducing regulator offers high flow capability with an inlet pressure up to 3000 psig and is an excellent choice for cylinder or point of use bulk and specialty gas applications.
The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.
The FR1403SA is for applications involving negative delivery pressures with low pressure gas sources.
FR1400 Series UHP Regulator Features
- 316L stainless steel body
- Manufactured for ultra high purity semiconductor gas applications
- Metal-to-metal diaphragm seal
- 10 μ in. Ra surface finish
- Passivated & Electropolished
- Tied diaphragm design
- Hastelloy C-22® diaphragm and poppet standard
- Flows up to 800 slpm (28 scfm)
FR1400 Series UHP Regulator Markets
- Semiconductor Fab Installations
- Gas Companies
FR1400 Series UHP Regulator Applications
- Tool Hook-Up
- Valve Manifold Boxes
- Gas Cabinets
- "Point of Use" pressure regulation
Download Parker Veriflo FR1400 Series UHP High Flow Single Stage Pressure Reducing Regulator Datasheet Talk to one of our proess control experts today at
(855) 737-4714, or fill out our
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Download Parker Veriflo FR1400 Series UHP High Flow Single Stage Pressure Reducing Regulator Datasheet
