The FR1300 Series ultra high purity, pressure reducing regulator offers high-flow capability with an inlet pressure up to 600 psig and is an excellent choice for point of use bulk and specialty gas applications.
FR1300 Series UHP Regulator Features
- 316L stainless steel body
- Manufactured for ultra high purity semiconductor gas applications
- Metal-to-metal diaphragm seal
- 10 μin. Ra surface finish
- Passivated & Electropolished
- Hastelloy C-22® diaphragm
- Flow capacity: 1.2 Cv
- Flows up to 1200 slpm (42 scfm)
FRN1300 Series UHP Regulator Markets
- Semiconductor Fab Installations
- Gas Companies
FRN1300 Series UHP Regulator Applications
- Tool Hook-Up
- "Point of Use" pressure regulation
Download Parker Veriflo FR1300 Series UHP Single Stage Pressure Reducing Regulator Datasheet Talk to one of our proess control experts today at
(855) 737-4714, or fill out our
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Download Parker Veriflo FR1300 Series UHP Single Stage Pressure Reducing Regulator Datasheet
