CMP Retrofit Solutions

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller:

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller 

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller
Malema LFC-7000 Series Ultrasonic Liquid Flow Controller

Malema's LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries. A typical module for high-accuracy control of ultrapure chemicals combines a Malema ultrasonic flowmeter, with accuracy rated at +/- 1% reading, with a Malema control valve. The ultrasonic flowmeter has an all PFA construction with no moving parts or seals. It sets a standard for flow measurement in terms of accuracy, repeatability, and purity.

Learn More: Malema LFC-7000 Series Ultrasonic Liquid Flow Controllers

 

Malema LFC-7650 Integrated Flow Control Module:

Malema LFC-7650 Integrated Flow Control Module 

Malema LFC-7650 Integrated Flow Control Module
Malema LFC-7650 Integrated Flow Control Module

Malema's LFC-7650 Series high-performance closed-loop flow controllers with integrated pressure transducer designed for use in a wide variety of high purity liquids including DI water and harsh chemicals. A typical module combines a Malema Sensors ultrasonic flow meter with a Malema control valve. It sets the standard for flow measurement in terms of accuracy, repeatability, turndown, and purity.


Learn More: Malema LFC-7650 Integrated Flow Control Module
 

Have questions? Email our technical specialists at semifab@valin.com or fill out the form below to have one of our technical specialists contact you to discuss your process issues related to CMP Tools.

 

Short description

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller