LFC-7650 Integrated Flow Control Module from Malema

Ultrasonic Liquid Flow Controller with built-in Pressure Sensor

LFC-7650 Integrated Flow Control Module from MalemaThe LFC-7650 Series is a line of high-performance closed-loop flow controllers with integrated pressure transducer designed for use in a wide variety of high purity liquids including DI water and harsh chemicals.

A typical module combines a Malema Sensors ultrasonic flow meter with a Malema control valve. It sets the standard for flow measurement in terms of accuracy, repeatability, turndown, and purity. Its Digital Signal Processing (DSP) technology ensures reliable performance even with a certain degree of bubbles present in the process fluids. The high speed/precision motor actuated diaphragm valve helps provide a fast precise response with minimal overshoot.

In operation, the user inputs a flow rate set point via an analog signal. The flow control electronics module continuously compares this set point value with the flow rate reported by the flow meter and drives the motor to modulate the control valve to maintain the desired set point. State of the art control algorithm together with a high speed/precision flow meter and valve achieves fast, accurate, and repeatable control. 

Features

LFC-7650 Integrated Flow Control Module Features

  • High Accuracy - Controls flow rate to within 1% of set point; ideal for fluid blending and/or dispense applications
  • Fast Response 3 seconds (typically < 2 seconds for most applications)
  • High flow turndown ratio (20:1)
  • Wide range of flow control capability; 50 ml/min - 4000 ml/min
  • All Polytetrafluoroethylene (PTFE) / Perfluoroalkoxy (PFA) wetted part construction ensures compatibility with UHP liquid chemicals, and DI water
  • With in-built pressure sensor analog output
  • Low maintenance - modules featuring ultrasonic flow meters with NO moving parts, providing the ultimate in uptime

Specifications

LFC-7650 Integrated Flow Control Module Specifications

  • Mounting Orientation: Horizontal
  • Fluid Connections: Inlet/Outlet: 1/4” or 3/8”, Male Flare or Male Super Pillar 300
  • Flow Restrictions (orifice): > 2 mm
  • Ingress Rating: IP64

Applications

LFC-7650 Integrated Flow Control Module Applications

  • Semiconductor CMP (Chemical Mechanical Planarization) tools - used to precisely control the flow of DI water and chemical slurries
  • Wet Cleaning tools for accurate and reliable control of the blending and delivery of cleaning chemistries
  • Copper Plating tools well suited for chemical mixing and dispensing applications

Q & A

Q&A Section with Expand/Collapse Icons

LFC-7650 Integrated Flow Control Module Q & A

+ What is the flow control range of the LFC-7650 Ultrasonic Liquid Flow Controller?
The LFC-7650 offers a wide flow control range from 50 mL/min to 4,000 mL/min, making it suitable for various applications requiring precise fluid management.
+ How accurate is the flow control?
The module provides high accuracy, controlling the flow rate to within ±1% of the set point across its entire flow range. This precision ensures consistent and reliable fluid delivery.
+ What materials are used in the construction?
The LFC-7650 is constructed with all Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) wetted parts, ensuring compatibility with Ultra High Purity (UHP) liquid chemicals and Deionized (DI) water.
 
+How does the LFC-7650 handle varying process conditions?
Equipped with Digital Signal Processing (DSP) technology, the LFC-7650 maintains reliable performance even in the presence of bubbles in process fluids. It also eliminates measurement drifts caused by environmental and temperature changes, ensuring consistent flow control.
 
+ What are the typical applications for the LFC-7650?
The LFC-7650 is ideal for use in semiconductor Chemical Mechanical Planarization (CMP) tools, wet cleaning tools, and copper plating tools, where precise control of fluid blending and dispensing is crucial.
 

Downloads

Download Malema LFC-7650 Integrated Flow Control Module Datasheet 
 

Talk to one of our process control experts today at (855) 737-4714 or fill out our online form to learn more.

 

 
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