The LFC-7650 Series is a line of high-performance closed-loop flow controllers with integrated pressure transducer designed for use in a wide variety of high purity liquids including DI water and harsh chemicals.
A typical module combines a Malema Sensors® ultrasonic flow meter with a Malema control valve. It sets the standard for flow measurement in terms of accuracy, repeatability, turndown, and purity. It’s Digital Signal Processing (DSP) technology ensures reliable performance even with a certain degree of bubbles present in the process fluids. The high speed/precision motor actuated diaphragm valve helps provide a fast precise response with minimal overshoot.
In operation, the user inputs a flow rate set point via an analog signal. The flow control electronics module continuously compares this set point value with the flow rate reported by the flow meter and drives the motor to modulate the control valve to maintain the desired set point. State of the art control algorithm together with a high speed/precision flow meter and valve achieves fast, accurate, and repeatable control.
LFC-7650 Integrated Flow Control Module Features
- High Accuracy - Controls flow rate to within ± 1% of set point; ideal for fluid blending and/or dispense applications
- Fast Response 3 seconds (typically < 2 seconds for most applications)
- High flow turndown ratio (20:1)
- Wide range of flow control capability; 50 ml/min - 4000 ml/min
- All Polytetrafluoroethylene (PTFE) / Perfluoroalkoxy (PFA) wetted part construction – ensures compatibility with UHP liquid chemicals, and DI
- water.
- With in-built pressure sensor analog output
- Low maintenance - modules featuring ultrasonic flow meters with NO moving parts, providing the ultimate in uptime.
LFC-7650 Integrated Flow Control Module Applications
- Semiconductor CMP (Chemical Mechanical Planarization) tools - used to precisely control the flow of DI water and chemical slurries
- Wet Cleaning tools – for accurate and reliable control of the blending and delivery of cleaning chemistries.
- Copper Plating tools – well suited for chemical mixing and dispensing applications.
Download Malema LFC-7650 Integrated Flow Control Module Datasheet Talk to one of our process control experts today at
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Download Malema LFC-7650 Integrated Flow Control Module Datasheet
