The Trufluor+™ filter housing is designed for maximum chemical resistance and high purity for microelectronics applications. Constructed of PFA (wetted parts) and PVDF (non-wetted parts), this housing is compatible with the most aggressive chemistries. The high-purity materials of construction and cleanroom packaging insure a high level of cleanliness. The housing consists of a stationary bowl and locking ring that provides a positive seal and easy filter replacement. It is compatible with our Fluoroflow® line of all-fluoropolymer cartridges including the large-diameter Fluoroflow®-XL in lengths of 10, 20 and 30 inches.
Benefits:
- Excellent chemical resistance
- High-purity construction
- Packaged in cleanroom
- High flow rates
- Compatible with 2.75˝ and 3.25˝ diameter cartridges
Applications:
- Wet etch and clean (90°C or less)
- Photochemicals
- DI water
Specifications:
Materials of ConstructionHead and Bowl: High Purity PFA
O-Ring: FEP Encapsulated Viton®
Locking Ring: PVDF (non-wetted part)
Connections:Inlet/Outlet:
¾˝ or 1˝ Flare
¾˝ or 1˝ Butt-Weld
Vent/Drain:
¼˝ Flare
¼˝ Butt-Weld
¼˝ NPTF
3/8˝ Closed
3/8˝ Flare
Maximum Operating Specifications50 psig (3.4 bar) at 194°F (90°C)
100 psig (6.9 bar) at 77°F (25°C)
Download Parker Trufluor+ High Purity PFA Filter Housing Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.