Parker Trufluor +™ High Purity PFA Filter Housing

The Trufluor+™ filter housing is designed for maximum chemical resistance and high purity for microelectronics applications. Constructed of PFA (wetted parts) and PVDF (non-wetted parts), this housing is compatible with the most aggressive chemistries. The high-purity materials of construction and cleanroom packaging insure a high level of cleanliness. The housing consists of a stationary bowl and locking ring that provides a positive seal and easy filter replacement. It is compatible with our Fluoroflow® line of all-fluoropolymer cartridges including the large-diameter Fluoroflow®-XL in lengths of 10, 20 and 30 inches.

 

Benefits:

• Excellent chemical resistance
• High-purity construction
• Packaged in cleanroom
• High flow rates
• Compatible with 2.75˝ and 3.25˝ diameter cartridges

Applications:

• Wet etch and clean (90°C or less)
• Photochemicals
• DI water

Specifications:

Materials of Construction
Head and Bowl:     High Purity PFA
O-Ring:     FEP Encapsulated Viton®
Locking Ring:     PVDF (non-wetted part)

Connections:
Inlet/Outlet:
¾˝ or 1˝ Flare
¾˝ or 1˝ Butt-Weld

Vent/Drain:
¼˝ Flare
¼˝ Butt-Weld
¼˝ NPTF
3/8˝ Closed
3/8˝ Flare

Maximum Operating Specifications
50 psig (3.4 bar) at 194°F (90°C)
100 psig (6.9 bar) at 77°F (25°C)




Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.