Chemically-Resistant Cartridge for Ultrapure Microelectronics Fluids and Gases
The Proflow™ II-E filter cartridge uses a PTFE membrane along with high-purity polypropylene supports that provide an economical alternative to all-fuoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fow and lifetime. This filter is ideally suited for ultrapure microelectronics fuids and gases. The hydrophobic PTFE membrane serves as a highly effcient barrier to insure low moisture content of gases. It is available dry or wet-packed for quick installation and lower extractables.
Parker Proflow™ II-E Cartridge Benefits:
- Good liquid and gas flow rates
- Wet-pack option for quick installation
- PTFE/ PP construction for chemical resistance
- Wide variety of configurations and ratings
- 100% integrity tested in cleanroom environment
Parker Proflow™ II-E Cartridge Applications:
- Bulk chemical delivery
- Acids, bases, solvents, photochemicals
- Wet etch and clean
- Dilute acids
- DI water (<80C)
- Ultrapure electronics-grade gases
Parker Proflow™ II-E Cartridge Specifications:
Materials of Construction
Membrane: PTFE
Support layers: Polypropylene
Structure: Polypropylene
All components are thermally bonded to ensure integrity and reduce extractables.
Effective Filtration Area
4.6ft2 (0.43 m2) 5 (130mm) cartridges
9.3ft2 (0.86 m2) 10 (250mm) cartridges
Maximum Differential
Pressure/Temperature
Forward:
80psid (5.5bar) @ 75°F (24°C)
40psid (2.8bar) @ 180°F (82°C)
Reverse:
50psid (3.4bar) @ 75°F (24°C)
Cleanliness (particle shedding)
Wet-packed: <1 particles/ml >0.2m after 6gal @ 1gpm
Data as from open bag and installed, no additional installation flushing.
TOC/Resistivity Rinse-up (wet-packed)
TOC rinse-up to background plus 5ppb of feed after 70gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 30gal @ 1gpm.
Download Parker Proflow II E Cartridge Datasheet
Talk to one of our filtration experts today at (855) 737-4717 or fill out our online form to learn more.
Chemically-resistant cartridge for ultrapure microelectronics fluids and gases