Parker Proflow™ II-E Cartridge

Chemically-Resistant Cartridge for Ultrapure Microelectronics Fluids and Gases


The Proflow™II-E filter cartridge uses a PTFE membrane along with high-purity polypropylene supports that provide an economical alternative to all-fuoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fow and lifetime. This filter is ideally suited for ultrapure microelectronics fuids and gases. The hydrophobic PTFE membrane serves as a highly effcient barrier to insure low moisture content of gases. It is available dry or wet-packed for quick installation and lower extractables.


Benefits:

  • Good liquid and gas flow rates
  • Wet-pack option for quick installation
  • PTFE/ PP construction for chemical resistance
  • Wide variety of configurations and ratings
  • 100% integrity tested in cleanroom environment


Applications:

  • Bulk chemical delivery
    • Acids, bases, solvents, photochemicals
  • Wet etch and clean
    • Dilute acids
    • DI water (<80°C)
  • Ultrapure electronics-grade gases


Specifications:


Materials of Construction
Membrane:  PTFE
Support layers:  Polypropylene
Structure:  Polypropylene
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area
4.6ft2 (0.43 m2) 5˝ (130mm) cartridges
9.3ft2 (0.86 m2) 10˝ (250mm) cartridges

Maximum Differential
Pressure/Temperature

Forward:
80psid (5.5bar) @ 75ºF (24ºC)
40psid (2.8bar) @ 180ºF (82ºC)

Reverse:
50psid (3.4bar) @ 75ºF (24ºC)

Cleanliness (particle shedding)
Wet-packed: <1 particles/ml >0.2μm after 6gal @ 1gpm
Data as from open bag and installed, no additional installation flushing.

TOC/Resistivity Rinse-up (wet-packed)
TOC rinse-up to background plus 5ppb of feed after 70gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 30gal @ 1gpm.


Download Parker Proflow II E Cartridge Datasheet


Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.
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