Parker Polyflow Microelectronic Membrane Cartridges

Parker Polyflow Membrane Cartridge 

Parker Polyflow Membrane Cartridge
Parker Polyflow Membrane Cartridge

Polyflow Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fluoropolymer-based cartridges. 

Every cartridge is fabricated in a clean room environment, pre-flushed with 18 megohm-cm ultrapure DI water, and 100% integrity tested in an ISO certified facility.


Parker Polyflow Microelectronic Membrane Cartridges Benefits:

  • High-retention membrane
  • Wide range of configurations and ratings
  • 100% integrity tested


Parker Polyflow Microelectronic Membrane Cartridges Applications:

  • Bulk photoresist
  • Bulk electronics grade chemicals


Parker Polyflow Microelectronic Membrane Cartridges Materials of Construction:

Membrane: Polypropylene
Support layers: Polypropylene
Structure: Polypropylene

All components are thermally bonded to ensure integrity and to reduce extractables.

 

Effective Filtration Area:

7.7ft2 (0.72m2) 0.04 pore size per 10" (250mm) cartridge
6.6ft2 (0.61m2) 0.07 pore size per 10" (250mm) cartridge*
7.7ft2 (0.72m2) 0.1 pore size per 10" (250mm) cartridge
7.7ft2 (0.72m2) 0.2 pore size per 10" (250mm) cartridge

* Double layers of membrane 

 

Metals Extractables*:

<50ppb (total)

*In a 10% HNO3 extraction


Maximum Differential Pressure/Temperature:

Forward: 80psid (5.5bar) @ 75°F (24°C)*
40psid (2.8bar) @ 180°F (82°C)

Reverse: 40psid (2.8bar) @ 75°F (24°C)
60 psid (4.1 Bar) @ 75°F for 0.04m
 

Cleanliness (particle shedding):

Wet-packed: <1 particles/ml >0.2m after 10gal at 1gpm

Data from bag open and installed, no additional installation flushing.

 

TOC/Resistivity Rinse-up (wet-packed):

TOC rinse-up to background plus 5ppb of feed after 40gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 40gal @ 1gpm.
 

Parker Polyflow Membrane Cartridge Filter Datasheet 



Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.

 

Short description

Polyflow Membrane cartridges are for use in microelectronics applications and is an economical alternative to fluoropolymer cartridges.