Parker Polyflow Microelectronic Membrane Cartridges

Parker Polyflow Membrane Cartridge
Polyflow® Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fluoropolymer-based cartridges. 

Every cartridge is fabricated in a clean room environment, pre-flushed with 18 megohm-cm ultrapure DI water, and 100% integrity tested in an ISO certified facility.


  • High-retention membrane
  • Wide range of configurations and ratings
  • 100% integrity tested


  • Bulk photoresist
  • Bulk electronics grade chemicals

Materials of Construction

Membrane: Polypropylene
Support layers: Polypropylene
Structure: Polypropylene
All components are thermally bonded to ensure integrity and to reduce extractables.

Effective Filtration Area

7.7ft2 (0.72m2) 0.04 pore size per 10" (250mm) cartridge
6.6ft2 (0.61m2) 0.07 pore size per 10" (250mm) cartridge*
7.7ft2 (0.72m2) 0.1 pore size per 10" (250mm) cartridge
7.7ft2 (0.72m2) 0.2 pore size per 10" (250mm) cartridge
* Double layers of membrane 

Metals Extractables*

<50ppb (total)
*In a 10% HNO3 extraction

Maximum Differential Pressure/Temperature

Forward: 80psid (5.5bar) @ 75°F (24°C)*
40psid (2.8bar) @ 180°F (82°C)

Reverse: 40psid (2.8bar) @ 75°F (24°C)
60 psid (4.1 Bar) @ 75°F for 0.04μm

Cleanliness (particle shedding)

Wet-packed: <1 particles/ml >0.2μm after 10gal at 1gpm
Data from bag open and installed, no additional installation flushing.

TOC/Resistivity Rinse-up (wet-packed)

TOC rinse-up to background plus 5ppb of feed after 40gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 40gal @ 1gpm.

Parker Polyflow Membrane Cartridge Filter Datasheet

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.

Engineered Solutions
A lesson for me is that I need to involve you earlier in the program.

You were tireless in your support and it will not be forgotten!

Valin Was There For Us
When we needed technical assistance and applications support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.