Polyflow® Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fluoropolymer-based cartridges.
Every cartridge is fabricated in a clean room environment, pre-flushed with 18 megohm-cm ultrapure DI water, and 100% integrity tested in an ISO certified facility.
Benefits
- High-retention membrane
- Wide range of configurations and ratings
- 100% integrity tested
Applications
- Bulk photoresist
- Bulk electronics grade chemicals
Materials of Construction
Membrane: Polypropylene
Support layers: Polypropylene
Structure: Polypropylene
All components are thermally bonded to ensure integrity and to reduce extractables.
Effective Filtration Area
7.7ft2 (0.72m2) 0.04 pore size per 10" (250mm) cartridge
6.6ft2 (0.61m2) 0.07 pore size per 10" (250mm) cartridge*
7.7ft2 (0.72m2) 0.1 pore size per 10" (250mm) cartridge
7.7ft2 (0.72m2) 0.2 pore size per 10" (250mm) cartridge
* Double layers of membrane
Metals Extractables*
<50ppb (total)
*In a 10% HNO3 extraction
Maximum Differential Pressure/Temperature
Forward: 80psid (5.5bar) @ 75°F (24°C)*
40psid (2.8bar) @ 180°F (82°C)
Reverse: 40psid (2.8bar) @ 75°F (24°C)
60 psid (4.1 Bar) @ 75°F for 0.04μm
Cleanliness (particle shedding)
Wet-packed: <1 particles/ml >0.2μm after 10gal at 1gpm
Data from bag open and installed, no additional installation flushing.
TOC/Resistivity Rinse-up (wet-packed)
TOC rinse-up to background plus 5ppb of feed after 40gal @ 1gpm.
Resistivity rinse-up to background minus 0.2megohm-cm of feed after 40gal @ 1gpm.
Parker Polyflow Membrane Cartridge Filter Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.
Parker Polyflow Membrane Cartridge Filter Datasheet
