Parker Polyflow® Membrane

Polypropylene Membrane Cartridges for Microelectronics

Polyflow® Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fluoropolymer-based cartridges.

Every cartridge is fabricated in a clean room environment, pre-flushed with 18 megohm-cm ultrapure DI water, and 100% integrity tested in an ISO-certified facility.

Benefits:

• High-retention membrane
• Wide range of conf gurations and ratings
• 100% integrity tested

Applications:

• Bulk photoresist
• Bulk electronics grade chemicals

Specifications:

Materials of Construction
Membrane:     Polypropylene
Support layers:     Polypropylene
Structure:     Polypropylene

All components are thermally bonded to ensure integrity and to reduce extractables.

Effective Filtration Area
7.7ft2 (0.72m2) 0.04 pore size per 10" (250mm) cartridge
6.6ft2 (0.61m2) 0.07 pore size per 10" (250mm) cartridge*
7.7ft2 (0.72m2) 0.1 pore size per 10" (250mm) cartridge
7.7ft2 (0.72m2) 0.2 pore size per 10" (250mm) cartridge
* Double layers of membrane

Metals Extractables*
<50ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:
80psid (5.5bar) @ 75°F (24°C)*
40psid (2.8bar) @ 180°F (82°C)

Reverse:
40psid (2.8bar) @ 75°F (24°C)
60 psid (4.1 Bar) @ 75°F for 0.04μm

Cleanliness (particle shedding)
Wet-packed: <1 particles/ml >0.2μm after 10gal at 1gpm
Data from bag open and installed, no additional installation flushing.




Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.