Parker Fluoroflow® XL Cartridge

Highest-Performance All-Fluoropolymer Cartridge for Aggressive Applications

The Fluoroflow®-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter cartridge (3.25) combined with our unique SELECT pleating technology that increases filtration area and flow rate by over 70%. This results in increased bath turnover and longer filter lifetime demanded by todays advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Parker Fluoroflow® XL Cartridge Benefits:

Extra-large filtration area for longer life
Highest fow rates for maximum bath turn over
Wet-pack option for quick installation
Ultraclean option for absolute cleanliness
All-fluoropolymer for maximum chemical resistance
100% integrity tested for consistent quality

Parker Fluoroflow® XL Cartridge Applications:

Wet etch and clean
- Phosphoric acid
- Sulfuric acid
- Hydrofluoric acid
- Nitric acid
- Piranha
- SC1,SC2
- NMP-based solvents
Other high temperature or ozonated processes

Parker Fluoroflow® XL Cartridge Specifications:

Materials of Construction
100% Fluoropolymer construct
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area per 10
(250mm) Cartridge
22.5ft2 (2.04 m2) 0.03m
21.5ft2 (1.99 m2) 0.05m
18.5ft2 (1.71 m2) 0.10m

Metals Extractables*
Standard: <30ppb (total)
Ultraclean: <7ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:
70psid (5.5bar) @ 75°F (24°C)
50psid (3.8bar) @ 167°F (75°C)
30psid (2.0bar) @ 257°F (125°C)
15psid (1.0bar) @ 300°F (150°C)

Forward HT option:
15psid (1.0bar) @ 356°F (180°C)

Reverse:
50psid (3.4bar) @ 75°F (24°C)
15psid (1.0bar) @ 250°F (121°C)

Cleanliness (particle shedding)
Wet-packed: <2 particles/ml >0.2m after 7gal @ 1gpm
Dry-packed: <2 particles/ml >0.2m after 12gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed without additional rinse-up.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.