Parker Fluoroflow® XL Cartridge

Highest-Performance All-Fluoropolymer Cartridge for Aggressive Applications

The Fluoroflow®-XL filter cartridge is setting the new standard for exceptional flow rates and on-stream life. It utilizes a larger diameter cartridge (3.25˝) combined with our unique SELECT pleating technology that increases filtration area and flow rate by over 70%. This results in increased bath turnover and longer filter lifetime demanded by today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Benefits:

• Extra large fltration area for longer life
• Highest fow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fuoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications:

• Wet etch and clean
  • Phosphoric acid
  • Sulfuric acid
  • Hydrofluoric acid
  • Nitric acid
  • Piranha
  • SC1,SC2
  • NMP-based solvents
• Other high temperature or ozonated processes

Specifications:

Materials of Construction
100% Fluoropolymer construct
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area per 10˝
(250mm) Cartridge
22.5ft2 (2.04 m2) 0.03μm
21.5ft2 (1.99 m2) 0.05μm
18.5ft2 (1.71 m2) 0.10μm

Metals Extractables*
Standard:     <30ppb (total)
Ultraclean:     <7ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:
70psid (5.5bar) @ 75ºF (24°C)
50psid (3.8bar) @ 167ºF (75°C)
30psid (2.0bar) @ 257ºF (125ºC)
15psid (1.0bar) @ 300ºF (150ºC)

Forward HT option:
15psid (1.0bar) @ 356ºF (180ºC)

Reverse:
50psid (3.4bar) @ 75ºF (24ºC)
15psid (1.0bar) @ 250ºF (121ºC)

Cleanliness (particle shedding)
Wet-packed:  <2 particles/ml >0.2μm after 7gal @ 1gpm
Dry-packed:  <2 particles/ml >0.2μm after 12gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed without additional rinse-up.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.