Parker Fluoroflow®-HSA Cartridge

Increased Performance All-Fluoropolymer Cartridge for Aggressive Applications

The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow®. This results in increased bath turnover and longer filter lifetime demanded by todays fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Parker Fluoroflow®-HSA Cartridge Benefits:

Increased fltration area for longer life
Higher fow rates for increased bath turn over
Wet-pack option for quick installation
Ultraclean wet-pack option for absolute cleanliness
All-fuoropolymer for most maximum chemical resistance
100% integrity tested for consistent quality

Parker Fluoroflow®-HSA Cartridge Applications:

Wet etch and clean
- Phosphoric acid
- Sulfuric acid
- Hydrof uoric acid
- Nitric acid
- Piranha SC1,SC2
- NMP-based solvents
Other high temperature or ozonated processes

Parker Fluoroflow®-HSA Cartridge Specification:

Materials of Construction
100% Fluoropolymer construction
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area
4.8ft2 (0.45 m2) 4 (100mm) cartridge
9.8ft2 (0.91 m2) 10 (250mm) cartridge

Metals Extractables*
Standard: <20ppb (total)
Ultraclean: <5ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:
80psid (5.5bar) @ 75°F (24°C)
55psid (3.8bar) @ 167°F (75°C)
30psid (2.0bar) @ 257°F (125°C)
15psid (1.0bar) @ 300°F (150°C)

Forward HT option:
100psid (6.8bar) @ 75°F (24°C)
75psid (5.1bar) @ 167°F (75°C)
50psid (3.4bar) @ 257°F (125°C)
15psid (1.0bar) @ 356°F (180°C)

Reverse:
50psid (3.4bar) @ 75°F (24°C)
15psid (1.0bar) @ 250°F (121°C)

Cleanliness (particle shedding)
Wet-packed:
<2 particles/ml >0.2m after 7gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed without additional rinse-up.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.