Parker Fluoroflow HSA Filter Cartridge

Parker Fluoroflow HSA Filter Cartridge
Increased performance all-fluoropolymer cartridge for aggressive applications

The Fluoroflow-HSA pleated PTFE membrane filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than standard Fluoroflow. This results in increased bath turnover and longer filter lifetime demanded by today's fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet packed which offers the lowest metals extractables in the industry.

  • Increased filtration area for longer life
  • Higher flow rates for increased bath turn over
  • Wet-pack option for quick installation
  • Ultraclean wet-pack option for absolute cleanliness
  • All-fluoropolymer for most maximum chemical resistance
  • 100% integrity tested for consistent quality

  • Wet etch and clean – Phosphoric acid, Sulfuric acid, Hydrofluoric acid, Nitric acid, Piranha, SC1,SC2, NMP-based solvents
  • Other high temperature or ozonated processes

  • Materials of Construction – 100% Fluoropolymer construction. All components are thermally bonded to ensure integrity and reduce extractables
  • Effective Filtration Area – 4.8ft2 (0.45 m2) 4˝ (100mm) cartridge, 9.8ft2 (0.91 m2) 10˝ (250mm) cartridge
  • Metals Extractables – Standard: <20ppb (total), Ultraclean: <5ppb (total)
  • Maximum Differential Pressure/Temperature (Forward) – 80psid (5.5bar) @ 75ºF (24ºC), 55psid (3.8bar) @ 167ºF (75ºC), 30psid (2.0bar) @ 257ºF (125ºC), 15psid (1.0bar) @ 300ºF (150ºC)
  • Maximum Differential Pressure/Temperature (Forward HT option) – 100psid (6.8bar) @ 75ºF (24ºC), 75psid (5.1bar) @ 167ºF (75ºC), 50psid (3.4bar) @ 257ºF (125ºC), 15psid (1.0bar) @ 356ºF (180ºC)
  • Maximum Differential Pressure/Temperature (Reverse) -50psid (3.4bar) @ 75ºF (24ºC), 15psid (1.0bar) @ 250ºF (121ºC)
  • Cleanliness (particle shedding) Wet-packed – <2 particles/ml >0.2μm after 7gal @ 1gpm
  • TOC/Resistivity Rinse-up (wet-packed) – TOC recovery within 3-5ppb of feed without additional rinse-up
  • Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm

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Download the Parker Fluoroflow HSA Filter Cartridge Datasheet

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.
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