LiquiPro F2 All-PTFE Filters from Porvair
LiquiPro F2 All-PTFE Filters from Porvair
LiquiPro™ BU is a superior advanced duo-retention filtration mechanism for dilute high flow and BOE cleaning applications.
Final assembly is purged with filtered nitrogen for initial cleanliness. A variety of end fittings are offered for easy installation.
Final assembly is purged with filtered nitrogen for initial cleanliness. A variety of end fittings are offered for easy installation.
LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Features:
- Optimised highly asymmetric polyethersulfone (HAPES) high flow, low pressure drop membrane provides sieving and absorption particle retention mechanisms down to 50nm.
- LiquiPro™ BU filter is hydrophilic and can be used without pre-wetting to maximise process up-time.
- LiquiPro™ BU eliminates pre-wetting and micro-bubbles to reduce downtime. Manufactured from HAPES membrane which has superior wetting properties compared with polyethylene.
- If spontaneously wet, it remains fully wet and eliminates micro-bubble generation which is critical for advanced node processing.
- Fast rinse up time as filters has been pre-flushed with Ultrapure DI water (18.2 Megaohm-cm, TOC less than 100 ppb).
- Certificate of quality enclosed with each product lot for quality assurance that ensures filter-to-filter and lot-to-lot performance. Manufactured in clean room environment.
LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Applications:
- BOE (Buffered-Oxide Etch) and Dilute HF recirculation bath applications.
- Megasonic cleaning DHF, NH4OH filtration.
- CDI Water cleaning application in semiconductor wafer fabs.
LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Specifications:
- Pore size rating
- 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0m
- Maximum differential pressure:
- 5.2bar (75.4psi) @ 25°C (77°F)
- 1.9bar (27.5psi) @ 80°C (176°F)
- Compatibility and purity
- Filters do not use any binders, surfactants and adhesives for broad usage compatibilities. Only HAPES membrane and 100% virgin polypropylene.
- Materials of construction
- Filter media: Highly asymmetric polyethersulfone (HAPES) hydrophilic membrane
- Support: Polypropylene (PP)
- End caps, core, cage: Polypropylene (PP)
- O-rings: EPDM, FKM, E-FKM, F-FKM.
Download Porvair LiquiPro BU High Purity Hydrophilic PES Membrane Filters Datasheet
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Short description
Superior advanced duo-retention filtration mechanism for dilute high flow.