LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters from Porvair

LiquiPro™ F2 All-PTFE Filters from Porvair
LiquiPro™ BU is a superior advanced duo-retention filtration mechanism for dilute high flow and BOE cleaning applications.

Final assembly is purged with filtered nitrogen for initial cleanliness. A variety of end fittings are offered for easy installation.


LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Features

  • Optimised highly asymmetric polyethersulfone (HAPES) high flow, low pressure drop membrane provides sieving and absorption particle retention mechanisms down to 50nm.
  • LiquiPro™ BU filter is hydrophilic and can be used without pre-wetting to maximise process up-time.
  • LiquiPro™ BU eliminates pre-wetting and micro-bubbles to reduce downtime. Manufactured from HAPES membrane which has superior wetting properties compared with polyethylene.
  • If spontaneously wet, it remains fully wet and eliminates micro-bubble generation which is critical for advanced node processing.
  • Fast rinse up time as filters has been pre-flushed with Ultrapure DI water (18.2 Megaohm-cm, TOC less than 100 ppb).
  • Certificate of quality enclosed with each product lot for quality assurance that ensures filter-to-filter and lot-to-lot performance. Manufactured in clean room environment.

LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Applications

  • BOE (Buffered-Oxide Etch) and Dilute HF recirculation bath applications.
  • Megasonic cleaning DHF, NH4OH filtration.
  • CDI Water cleaning application in semiconductor wafer fabs.

LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Specifications

  • Pore size rating
    • 0.03, 0.05, 0.1, 0.2, 0.45 and 1.0μm
  • Maximum differential pressure:
    • 5.2bar (75.4psi) @ 25°C (77°F)
    • 1.9bar (27.5psi) @ 80°C (176°F)
  • Compatibility and purity
    • Filters do not use any binders, surfactants and adhesives for broad usage compatibilities. Only HAPES membrane and 100% virgin polypropylene.
  • Materials of construction
    • Filter media: Highly asymmetric polyethersulfone (HAPES) hydrophilic membrane
    • Support: Polypropylene (PP)
    • End caps, core, cage: Polypropylene (PP)
    • O-rings: EPDM, FKM, E-FKM, F-FKM.

Download Porvair LiquiPro™ BU High Purity Hydrophilic PES Membrane Filters Datasheet

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.

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