GasPro™ TEM-2260 series filters are specifically designed for the filtration of semiconductor gases when ultra-high flow rates are required. This all-welded assembly will deliver 0.003 micron particle retention where a high flow rate is required and space is limited.
A PTFE membrane and polypropylene supported cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.
A variety of fitting types are offered for easy installation.
GasPro™ TEM-2260 High Flow PTFE 316L In-Line Filter Features and Benefits
- Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
- Out of package cleanliness: Porvair's GasPro™ TEM-2260 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
- 100% helium leak tested: All units tested to 1x10-9 atm cc/second
GasPro™ TEM-2260 High Flow PTFE 316L In-Line Filter Specifications
- Filtration Rating: Porvair's porous ePTFE filters provide efficient 3 nm particle retention.
- Maximum operating temperature:
- 80°C (176°F).
- Recommended changeout: 6 months when operating above 69ºC (156ºF).
- Maximum operating pressure: 17.2 bar (250 psig) @ 20°C (68°F).
- Maximum forward flow differential pressure
- 20ºC (68ºF): 6.0 bar (87 psi)
- 80ºC (176ºF): 4.0 bar (58 psi)
GasPro™ TEM-2260 High Flow PTFE 316L In-Line Filter Applications
- General and process inert facilities gases.
- Clean-dry air (CDA*) for critical processes including front opening unified pod (FOUP) cleaning and photolithography.
Download Porvair GasPro™ TEM-2260 High Flow PTFE 316L In-Line Filter Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.
Download Porvair GasPro™ TEM-2260 High Flow PTFE 316L In-Line Filter Datasheet
