GasPro TEM-1760 High-Flow Ultra-High Purity All-316L In-Line Filter
GasPro TEM-1760 High-Flow Ultra-High Purity All-316L In-Line Filter
GasPro™ TEM-1760 Series filters are designed for 3 nm particle retention up to flow rates of 210 slpm and temperatures of 200°C (392°F).
The all-316LSS welded filter offers excellent bake-out characteristics for fast dry downs and in-line qualification.
GasPro™ TEM-1760 High-Flow Ultra-High Purity All-316L In-Line Filter Applications:
- Filtration in semiconductor processes.
- High-flow ultra-high purity inert and specialty gases.
GasPro™ TEM-1760 High-Flow Ultra-High Purity All-316L In-Line Filter Features and Benefits:
- Construction: All 316L stainless steel sintered fibre media and hardware.
- Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build-up on interior surfaces.
- Out of package cleanliness: Porvair's GasPro™ TEM-1760 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional. All units tested to 1x10-9 atm cc/second.
- All units tested to 1x10-9 atm cc/second.
Download Porvair GasPro TEM-1760 High-Flow Ultra-High Purity All-316L In-Line Filter Datasheet
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Short description
Designed for 3 nm particle retention up to flow rates of 210 slpm and temperatures of 200C (392F).