GasProTM TEM-1100 Series filters are designed for 3 nm particle retention up to flow rates of 300 scfm and temperatures of 150ºC (302ºF).
A PTFE Membrane and all-fluoropolymer support structure is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.
GasPro™ TEM-1100 Ultra-High Flow All-Fluoropolymer In-Line Filter Applications
- High-flow ultra-high purity inert and speciality gases.
- Semiconductor, TFT flat panel display, silicon wafer manufacturing, photovoltaic/solar process gases.
GasPro™ TEM-1100 Ultra-High Flow All-Fluoropolymer In-Line Filter Features and Benefits
- Filtration rating: Our porous PTFE filters provide efficient 3nm particle retention.
- Construction: An ePTFE membrane (2.73 m2 / 29.4 ft2) with a polypropylene support structure is enclosed within a stainless steel 316L housing for excellent flow and chemical resistance. A standard Viton® o-ring is used (other o-rings may be available upton rquest).
- Electro-polished housing: The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces
- Maximum differential pressure / temperature Forward:
- 80 psid (5.5 bar) @ 75ºF (24ºC)
- 55 psid (3.8 bar) @ 167ºF (75ºC)
- 30 psid (2.0 bar) @ 257ºF (125ºC)
- 15 psid (1.0 bar) @ 300ºF (150ºC)
- Maximum operating pressure: 17.2 bar (250 psig)
- 100% helium leak tested: All units tested to1x10-9 atm cc/second
- Out of package cleanliness: Our GasPro™ TEM-1100 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
Download GasPro™ TEM-1100 Ultra-High Flow All-Fluoropolymer In-Line Filter Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.