GasPro™ High Purity Gas Filters from Porvair

GasPro™ High Purity Gas Filters from PorvairGasPro High Purity Gas Filters from Porvair

Porvair GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices.

Porvair's GasPro™ filters for the solar power panel industry are offered in PTFE membrane, Polypropylene, 316L Sinterflo F sintered metal fiber, 316L Sinterflo P sintered powder, Nickel fiber, Nickel sintered powder and Hastelloy C22 sintered powder.

Features

GasPro™ High Purity Gas Filter Features:

  • Increased yield and efficiency - of thin film deposition process.
  • Protection of process equipment - PECVD process gas handling equipment.
  • Particle removal - remove toxic and abrasive particles from exhaust gases.
  • High efficiency filtration of gases - high efficiency filtration of bulk and specialty gases such as N2, H2, Ar, F2, NF3, He and Silane.
  • Maximum cleanliness - deionized water washed and filtered N2 flush to maximize out of box cleanliness.
  • Application and service environment - available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

Applications

GasPro™ High Purity Gas Filter Applications:

  • Filtration of inert gases used in load locks and process chambers
  • Point-of-use filtration of CVD (chemical vapor deposition), epitaxial, diffusion, plasma etch, and other critical dry processes
  • Instrument and component protection
  • Reduction of pump-down cycle times and particle contamination in load locks, as well as cooling and process chambers.
  • Process gases used in Plasma Enhanced Chemical Vapor Deposition (PECVD) systems for the manufacture of solar cell panels.
  • Processing gases for manufacturing the front glass used for photocells and solar panels.

Q & A

Q&A Section with Expand/Collapse Icons

GasPro™ High Purity Gas Filter Q & A

+ What are GasPro™ High Purity Gas Filters used for?
They are designed for critical gas distribution and delivery in thin-film deposition processes—such as manufacturing photovoltaic (solar) devices—where removing particulate contaminants is essential to improve yield and protect equipment.
+ What types of filter media are available?
Options include PTFE membrane, Polypropylene, 316L Sinterflo® sintered metal fiber, 316L sintered powder (Sinterflo® P), Nickel fiber, Nickel sintered powder, and Hastelloy C-22 sintered powder.
+ Which gases can be filtered with these filters?
They effectively filter bulk and specialty gases, including nitrogen (N₂), hydrogen (H₂), argon (Ar), fluorine (F₂), nitrogen trifluoride (NF₃), helium (He), and silane.
+ What levels of filtration performance do they offer?
Filters like the TEM-800 achieve 3 nm particle retention up to 10 scfm and temperatures up to 80 °C (176 °F).
+ What applications are they best suited for?

Ideal for point-of-use filtration in critical systems like load-locks, process chambers, PECVD, CVD, epitaxial, diffusion, plasma etch, solar cell manufacturing, and front-glass panel production. They also aid in reducing pump-down times and protecting equipment like valves and MFCs.

Downloads

Download Porvair Liquid and Gas Filtration Products for the Microelectronics and Semiconductor Industry Brochure

 

Talk to one of our filtration experts today at (855) 737-4717 or fill out our online form to learn more.

 

 
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