GasPro™ High Purity Gas Filters from Porvair

GasPro™ High Purity Gas Filters from Porvair
Porvair GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices.

Their GasPro™ filters for the solar power panel industry are offered in PTFE membrane, Polypropylene, 316L Sinterflo® F sintered metal fiber, 316L Sinterflo® P sintered powder, Nickel fiber, Nickel sintered powder and Hastelloy® C22 sintered powder.

GasPro™ High Purity Gas Filter Features

  • Increased yield and efficiency - of thin film deposition process.
  • Protection of process equipment - PECVD process gas handling equipment.
  • Particle removal - remove toxic and abrasive particles from exhaust gases.
  • High efficiency filtration of gases - high efficiency filtration of bulk and specialty gases such as N2, H2, Ar, F2, NF3, He and Silane.
  • Maximum cleanliness - deionized water washed and filtered N2 flush to maximize out of box cleanliness.
  • Application and service environment - available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

GasPro™ High Purity Gas Filter Applications

  • Filtration of inert gases used in load locks and process chambers
  • Point-of-use filtration of CVD (chemical vapor deposition), epitaxial, diffusion, plasma etch, and other critical dry processes
  • Instrument and component protection 
  • Reduction of pump-down cycle times and particle contamination in load locks, as well as cooling and process chambers.
  • Process gases used in Plasma Enhanced Chemical Vapor Deposition (PECVD) systems for the manufacture of solar cell panels.
  • Processing gases for manufacturing the front glass used for photocells and solar panels.

Download Porvair Liquid and Gas Filtration Products for the Microelectonics and Semiconductor Industry Brochure

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.
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