GasPro™ High Purity Gas Filters from Porvair

Porvair GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices.

Their GasPro™ filters for the solar power panel industry are offered in PTFE membrane, Polypropylene, 316L Sinterflo® F sintered metal fiber, 316L Sinterflo® P sintered powder, Nickel fiber, Nickel sintered powder and Hastelloy® C22 sintered powder.

GasPro™ High Purity Gas Filter Features

• Increased yield and efficiency - of thin film deposition process.
• Protection of process equipment - PECVD process gas handling equipment.
• Particle removal - remove toxic and abrasive particles from exhaust gases.
• High efficiency filtration of gases - high efficiency filtration of bulk and specialty gases such as N2, H2, Ar, F2, NF3, He and Silane.
• Maximum cleanliness - deionized water washed and filtered N2 flush to maximize out of box cleanliness.
• Application and service environment - available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

GasPro™ High Purity Gas Filter Applications

• Filtration of inert gases used in load locks and process chambers
• Point-of-use filtration of CVD (chemical vapor deposition), epitaxial, diffusion, plasma etch, and other critical dry processes
• Instrument and component protection 
• Reduction of pump-down cycle times and particle contamination in load locks, as well as cooling and process chambers.
• Process gases used in Plasma Enhanced Chemical Vapor Deposition (PECVD) systems for the manufacture of solar cell panels.
• Processing gases for manufacturing the front glass used for photocells and solar panels.

Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.