In wafer fabs, clean room makeup air generated from ambient air accounts for more than 15% of total energy consumption. Thousands of cubic meters of air are conditioned every hour for temperature control, humidity monitoring, and ultrafiltration — yet over 90% is exhausted by process tools, often at rates far above what safety regulations require.
Why? Conventional safety sensors struggle to accurately measure low exhaust flow, forcing fabs to maintain unnecessarily high exhaust rates to avoid costly shutdown risks.
Discover how Precision Sensors’ Echolocity Exhaust Velocity Sensor is changing the game.
- Safe, stable, and highly accurate at ultra-low airflow velocities
- Proven technology trusted in wafer fabs worldwide for 20+ years
- Helps reduce exhaust rates while maintaining safety compliance
- Improves equipment monitoring and simplifies air balancing
- Typical ROI in under 6 months through reduced energy costs
Using a calibrated averaging pitot tube, Echolocity gives fabs the confidence to safely optimize exhaust flow and dramatically improve energy efficiency.
Learn more about how Echolocity can help reduce fab operating costs while improving process reliability call 1-800-766-9580 or fill out our online form.