Parker's competitively priced FR Series ultra high purity regulators are perfect for controlling process gases in downstream point-of-use applications in semiconductor fabrication. Designed for valve manifold boxes, tool hookup, and gas cabinets, FR Series regulators feature low- and high-flow capacity, Hastelloy® C-22® diaphragms for increased cycle life and corrosion resistance, metal-to-metal seals, and more.
- Precise control of process gases
- Single-stage high and low flow options
- Superior value to reduce short- and long-term cost
FR1000 Series UHP Single Stage Pressure Reducing Regulator Features
- 316L stainless steel body
- Manufactured for ultra high purity gas delivery applications
- Metal-to-metal diaphragm seal standard
- Passivated & electropolished
- Integrated filtration
- Hastelloy® diaphragm standard
- 10 μ in. Ra surface finish
Applications: VMBs/CMBs, point-of-use tool hook-up, gas cabinets
Download FR Series UHP Single-Stage Pressure Regulators Datasheet
Talk to one of our experts today at (855) 737-4714, or fill out our online form to learn more.
Download FR Series UHP Single-Stage Pressure Regulators Datasheet
Printer-friendly version