The newly designed Malema MPT Series High-Purity PFA Pressure Sensor introduces temperature as well as pressure monitoring in a single device, ensuring safe, reliable and efficient flow control in critical semiconductor applications.
The MPT Series comes in two versions: the MPT-750 with a cable connection and the MPT-751 with a Hirose connector. The MPT-750 and MPT-751 are available in single-port and flow-through designs. Both offer a standard pressure output and an optional temperature analog output.
The MPT Series empowers operators with the versatility needed to adapt to diverse conditions, ensuring reliable product yields in critical semiconductor applications.
Features
MPT-750 High-Purity PFA Pressure Sensor Features:
- Dual Functionality: Economical fluid pressure and temperature sensing from a single device
- High-Purity Materials: Wetted materials made from PFA and FFKM to help ensure compatibility with high-purity applications
- Temperature Range: Suitable for single-phase fluids from 0°C to 70°C
- Design Flexibility: Available in both single port and flow-through designs
Applications
MPT-750 High-Purity PFA Pressure Sensor Applications:
- Wet Etch
- Wet Clean
- Chemical and Mechanical Planarization (CMP)
- Electrochemical Deposition (ECD)
- Electroless Deposition
- Wet Process / Chemical Distribution Systems
- Chemical and Slurry Blend Systems
Specifications
Available Models, Sizes and Connections
| Models | Pressure Sensor Only (MPT-750-P and MPT-751-P) |
| Pressure and Temperature Sensor (MPT-750-T and MPT-751-T) |
| Sizes | 1/4" | 3/8" | 1/2" | 3/4" | 1" |
| Single Port | X | X | X | ||
| Flow Through | X | X | X | X | X |
Fluid Connections: Tube, Pillar, and Flare
Performance Specifications
| Accuracy | ±1% FS |
| Repeatability | ±0.5% FS |
| Ambient Temperature | 0-50°C |
| Media Operating Temperature | -5-70°C (non-phase changing) |
| Measurable Fluids | Gases or non-phase-changing liquids |
| Maximum Operating Pressure | Depends on pressure range; typically, 2 bar over max pressure |
| Ingress Protection Class | IP64 |
| Output Options | Analog 4-20 mA or 0-10 V DC |
| Power Supply | 24 V DC ±10% |
| Digital Communication | RS-485 Malema Addressable Sensor Network (ASN) |
Electrical Specifications
| Output Options | Analog Output | Dual Passive 4-20 mA Current Loops, or Dual 0-10 V DC |
| Digital Output | Dual Open Collectors Max 30 mA @ 60 V DC | |
| Power Supply | 24 V DC ±10% | |
| Media Operating Temperature | -5-70°C (non-phase changing) | |
| Power Consumption | Max 30 mA @ 24 V DC | |
| Digital Communication | RS-85 | Malema Addressable Sensor Network (ASN) |
| Connector | Connector (MPT-751 sensors only) | 12-pin HR-30 Series Hirose Connector |
| Cable | 1 meter, 3 meter or custom length available for MPT-750-P and MPT-750-T | |
Q&A
MPT-750 High-Purity PFA Pressure Sensor Q & A
For the cable-based MPT-750 models, there are multiple wiring configurations (Options F, G, H, I, J) offering combinations of analog outputs, digital outputs, and RS-485—commonly delivered with 1 meter, 3 meter, or custom-length cables.
Downloads
Download Malema MPT Series High-Purity PFA Pressure Sensor Brochure
Talk to one of our process control experts today at (855) 737-4714 or fill out our online form to learn more.