ZFA Series Precision Nano Positioner from Parker

ZFA Design Overview For machinery or instrument builders requiring nanometer-level stability and ultra-low settling times for dynamic focusing applications, the Parker ZFA Series provides unmatched precision and performance. Being a precision machined, crossed roller guided, voice coil driven positioner utilizing the latest in linear encoder technology with selectable integration features, this state-of-the-art positioner is ideal for applications needing precise positioning and rapid step-and-settle responses, such as digital pathology, next-generation sequencing, and other dynamic imaging environments.

Learn more: ZFA Precision and Stability

Shop now: ZFA Pricing and Availability

Check out our blog: Z Focusing Tips

Nanometer Level Performance

With industry leading natural frequencies, the ZFA Z-Focus Axis provides stabilities on the nanometer scale. These, combined with single digit nanometer resolutions, allow for rapid step and settle moves, increasing image quality and throughput.

Precision Objective Bracket Alignment

Integral carriage datum features allow factory alignment of objective bracket to the travel path. Base datum features allow for easy integration of the ZFA Z-Focus Axis into instruments. Datum features are present with or without an included objective bracket for alignment in the field.

ZFA Series Precision Nano Positioner Features and Benefits:

Compact Design: With a form factor of 95 x 90 x 36 mm, the ZFA Series is compact yet robust, fitting seamlessly into a wide range of instruments.
High Load Capacity: The ZFA Series supports up to 1 kg of objective mass with its internal magnetic counterbalance, and up to 2 kg with an optional external counterbalance, enabling the use of larger objective lenses to increase the field of view.
Advanced Motion Control: The positioner is equipped with a high dynamic voice coil drive and precision crossroller guidance, ensuring smooth, accurate motion with zero wear over time.
Superior Encoder Technology: The ZFA features high-resolution linear encoders, available in incremental and analog options, providing nanometer-level resolution and exceptional positional accuracy.
Vertical Load Adjustability: The internal configurable magnetic counterbalance allows for variances in the application’s load.
Travel Adjustability: Adjustable hard stops assist in fine-tuning the travel range.
Integrated home reference: An integrated encoder reference mark can be used for a consistent and repeatable zero-point reference.
Ease of Integration: Designed with integral carriage and base datum, the ZFA Series allows for easy alignment and integration into new or existing instruments. Optional factory aligned objective brackets allow for seamless integration and instrument assembly
Controller Flexibility: There is no integrated controller which allows for various control options to be considered. Not all electronics are created equal with some controller & drive solutions resulting in higher mechanical performance than others.
Maintainability: Since the controller isn’t integrated into the mechanics, the entire system does not have to be disassembled to remove the actuator if and when there are problems with the electronics.
Compliant: Designed with CE and RoHS compliance in mind.

ZFA Series Nano-Precision Positioner Selectable Levels of Integration:

Objective Mounting Bracket Options
- M25-M32, SM1, and RMS mounting
- Custom brackets available
Configurable Internal Magnetic Counterbalance
-  Objective masses up to 1 kg
- Non-contact design
- Internal mounting
Optional Additional External Magnetic Counterbalance
- Objective masses from 1 to 2 kg
- External mounting

ZFA Z-Focus Axis Nano-Precision Positioner Specifications:

The performance of the system is highly dependent on the electronics used with the mechanics. This is reflected below in the Standstill Stability specification. What is not reflected here though is the Move & Settle time which is very application specific, but also highly dependent on the quality of the electronics used. Learn more about the comparison work we’ve done between our solution and the typical solutions available.

	Units	ZFA
Travel Range	mm	9
Travel (Hard Stop to Hard Stop)	mm	9.5 – 10.5
Top Hard Stop to Index Location	mm	4.9 to 5.1
Index to Bottom Hard Stop Location	mm	4.4 to 5.6
Resolution (Digital Encoder)	nm	2.5
Resolution (1 V p-p Sin/Cos Encoder) Divided by controller’s A/D resolution	µm	0.3 with 16-bit A/D
Positional Accuracy over full travel ^1,2	µm	+/- 4
Positional Accuracy over 1mm travel^1,2	µm	1
Positional Repeatability over full travel^1,2	nm	+/- 250
Angular Pitch per mm1,2	Arcsec	+/-2
Angular Roll per mm1,2	Arcsec	+/-2
Angular Yaw per mm1,2	Arcsec	+/-2
Index (Home) Repeatability1, 2, 3	µm	+/-0.2
Standstill Stability1, 2, 3, 4	Nm (rms)	5 to 15
Step and Settle Capability1, 2, 3, 4	nm	100nm step and settle within +/- 15nm < 15ms
Max Velocity (2.5nm digital encoder) Requires minimum of 20 Mhz encoder input	mm/sec	32
Continuous Motor Force	N	4
Peak Motor Force	N	10
Moving Mass (no bracket)	kg	0.455
Moving Mass (with std Objective bracket)	kg	0.455
Stage Mass (No bracket)	kg	1.15

Stage mounted to granite surface, 2.5 micron optical encoder.
Measurements taken at 35 mm above the center of the carriage.
Please see tables in ZFA catalog on pages 7-11 for more details.
Possible performance highly dependent on other system design factors, including drive and control.