Layered Heaters / Precision Bonded Assemblies from Watlow

Watlow Layered HeatersWatlow’s layered heaters provide the precision and flexibility needed to ensure the highest level of thermal performance in wafer processing applications. These planar heating circuits can be manufactured using various technologies, including thermal spray, thick film and thin film deposition, wet etching, and laser ablation. They are designed with distributed power circuitry and can accommodate multiple zones and multiple layers. Watlow has a wide range of integration capabilities that are compatible with various metal and ceramic substrates, depending on the application needs.

 

Watlow Bonding and Integrated SystemsWatlow provides precision elastomeric bonding and assembly integration capabilities for critical components in wafer processing tools. Specialized tooling and innovative bond methods enable superior control over dimensional characteristics and material properties. Watlow also applies elastomeric material expertise to custom molding solutions, both for assembly integration and as stand-alone coatings, seals, and gaskets.

Features

Layered Heaters / Precision Bonded Assembly Features

Layered Heater Features

  • Accommodate multiple zones and multiple layers
  • Enable customized resistance patterns designed with FEA/CFD
  • Provide high power densities (typ. 50 – 150 W/in2)
  • Offer low profile (microns to 0.5 mm)


Precision Bonded Assembly Features

  • Ensure flexibility with multiple substrate materials
  • Enable elastomer temperatures to 250°C
  • Provide custom thermal and mechanical properties (thermal conductivity 0.1 to 3.0 W/m-K)

Specifications

Layered Heater / Precision Bonded Assembly Specifications

Substrate Material MaximumTemperature
Austenitic stainless steel250°C
Ferritic stainless steel450°C
Titanium / molybdenum500°C
Aluminum250°C
Aluminum oxide500°C
Aluminum nitride600°C
Quartz / sapphire350°C

Q & A

Q&A Section with Expand/Collapse Icons

Layered Heater / Precision Bonded Assembly Q & A

+ What is a layered heater, and how does it differ from conventional heaters?
A layered heater is a precision, multi-zone heating circuit built on a metal or ceramic substrate. Unlike traditional single-zone heaters, layered heaters deliver superior temperature uniformity, faster thermal response, and independent zone control. These heaters are commonly used in semiconductor wafer-processing applications, where precise thermal performance is essential. Watlow’s layered heaters integrate advanced technologies such as thermal spray, thick film, and thin film processes, providing customizable heating solutions designed for cleanroom compatibility and tight temperature control.
 
+ How do I select the right layered heater for my semiconductor application?
Choosing the correct layered heater depends on factors such as substrate material, temperature range, power density, and number of heating zones. Semiconductor manufacturers often base their selection on process temperature requirements, wafer size, and the need for multi-zone uniformity. Watlow offers layered heaters with various substrate options and circuit technologies to match specific applications. Customers should also consider control compatibility, integration with existing equipment, and environmental conditions like vacuum or inert gas operation when selecting the ideal heater configuration.
+ What are the performance limits and expected lifetime of a layered heater?
Performance limits for layered heaters vary based on material and design, but they typically support high temperatures and withstand frequent thermal cycling without degradation. These heaters provide consistent temperature uniformity and stability, even in demanding semiconductor environments. Service life depends on factors such as operating temperature, thermal cycling rate, and contamination control. With proper installation and preventive maintenance, layered heaters offer long-term reliability, minimizing downtime and supporting consistent wafer-processing yields.
 
+ How do layered heaters integrate with temperature controls and sensors?
Layered heaters are designed to work as part of an integrated thermal system that includes temperature sensors, controllers, and power management. Each heating zone can be independently monitored and adjusted for precise temperature regulation. Accurate sensor placement and feedback loops ensure uniform heating and prevent thermal drift. Watlow’s layered heaters can be easily integrated into existing thermal control architectures, supporting advanced diagnostics, multi-zone control, and data feedback for real-time process monitoring in semiconductor tools. 
 
 
+ What should I know about customization, lead time, and supply chain for layered heaters?
Because layered heaters are often custom-engineered to meet specific semiconductor process needs, lead times may vary depending on complexity and configuration. Watlow provides quick access to technical drawings, material certifications, and documentation to streamline procurement and integration. Customization options include substrate selection, circuit design, heater geometry, and bonding methods. To ensure uninterrupted production, customers are encouraged to plan for spare units and confirm lead times early in the design phase. Watlow’s global manufacturing and support network also helps minimize supply chain delays for semiconductor customers worldwide. 

Downloads

Download Watlow Thermal Solutions for the Semiconductor Equipment Industry Brochure

Call us today at (855) 737-4718 to learn more, or fill out our online form and someone will get back to you.

 
A lesson for me is that I need to involve you earlier in the program.
You were tireless in your support and it will not be forgotten!
See More Testimonials
 
Valin Was There For Us
When we needed technical assistance and application support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.
See More Testimonials