Parker's FR1403 SA regulators are specially designed for sub-atmospheric gas point-of-use applications, gas cabinets and VMBs. As a part of the Parker FR Series family, this product represents a significant step forward in Parker's commitment to delivering high-performance solutions for Ultra High Purity (UHP) gas delivery applications.
The FR1403 SA regulators offer high flow capacity suited for hazardous gas applications with flows up to 30 slpm and is perfect for customers who require negative delivery pressures with low-pressure gas sources.
FR1403 SA Series Negative Pressure Regulator Benefits:
- The FR1403 SA regulator is designed for UHP gas delivery applications requiring negative delivery pressure down to -26 inches Hg vacuum (100 Torr).
- The proprietary hybrid spring design works in tandem with Veriflo's unique Hastelloy diaphragm, allowing precise pressure controls under vacuum & positive pressures from 0 psi 30 psig.
- Optimized for the delivery of low-pressure gases, including those from liquid generated from liquid sources.
- The standard convoluted, Hastelloy C-22 diaphragm and Hastelloy poppet ensures repeatable long cycle life while providing the highest corrosion resistance.
- Available in both standard 316L Stainless Steel and double melt 316L stainless steel body configurations.
- Designed for semiconductor gas cabinet, valve manifold box & related critical gas delivery systems.
Click here to learn more about the FR1400 Series UHP High Flow Single Stage Pressure Reducing Regulators.
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Parker's FR1403 SA regulators are designed for sub-atmospheric gas point-of-use applications, gas cabinets and VMBs.