Parker’s patented Evolve™ sealing technology equips users with unparalleled plasma resistance and phenomenal seal cleanliness for static and quasi-dynamic sealing applications in place of standard o-rings.
Using an engineered PTFE shield as a plasma barrier, the composite PTFE-FFKM vacuum seal delivers breakthrough performance within semiconductor fabrication equipment by extending seal uptime 2X-10X with dramatic reduction in leakage and seal contamination due to plasma attack. This represents a significant advancement over traditional o-ring sealing solutions. Unlike conventional seals, the Evolve seal is engineered to prevent unexpected tool downtime caused by seal failure, enabling fabs to strategically schedule preventive maintenance based on mechanical wear rather than unpredictable seal deterioration.
Beyond its superior material properties, the Evolve seal is designed with the user in mind. It features integrated ribs or nubs to facilitate easier, straightforward installation into existing seal groove designs such as dovetail, half-dovetail, and rectangular grooves. Additionally, it can be engineered for customized groove configurations per customer requirements.
Evolve Semiconductor Seal Ring Features & Benefits:
- Unparalleled plasma resistance utilizes PTFE shield continually energized by engineered elastomer to reduce plasma attack
- Phenomenal cleanliness - inert PTFE barrier prevents erosion of seal polymer
- Simplified assembly into dovetail grooves uses friction-fit rubber nubs to seat seal into groove without seal twisting
- Dramatically reduced total cost of ownership from increased MTBF due to breakthrough plasma resistance
Evolve Semiconductor Seal Ring Applications:
- Chamber lid seals
- Exhaust valves
- ISO valve seal
- Wafer pedestal seal
- Slit valve door seal
- Viewport seal
- Gas inlet/outlet seals
- Gas ring and gas nozzle seals
- Window seals
- Fitting seals
- Center rings
- Quartz chamber seals
- Plenum seals
- KF centering ring
Evolve Semiconductor Seal Ring Technical Specifications:
| Division: | Composite Sealing Systems Division |
| Industry: | Semiconductor |
| Materials of Construction: | Metal, Elastomer |
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Offering unmatched plasma resistance and superior cleanliness with its integrated PTFE plasma barrier.