The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
CMFC-9000 Series Coriolis Flow Controllers Features
- High Accuracy - Controls flowrate to within ± 1.0% of set point; ideal for fluid blending and/or dispense applications
- Fast Response 2 seconds (typically < 1 seconds for most applications)
- Broad application range with 2 types of control valves
- Wide range of flow control capability
- All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
- Mass flow measurement accuracy is independent of fluid density and viscosity
CMFC-9000 Series Coriolis Flow Controllers Applications
- Semiconductor CMP tools – suitable for use to precisely control the flow of chemi- cals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump based delivery systems.
- Cleaning tools – for accurate and reliable control in the blending and delivering of cleaning chemistries on post CMP cleaning and related tools.
- Copper plating tools – well suited to chemical mixing and dispense applications
CMFC-9000 Series Coriolis Flow Controllers Specifications
| Flow Ranges | Available from 25 grams per minute to 3000 grams per minute |
| End Connections | 1⁄4”, 3/8” in Pillar or Flare and other customs options |
| Input Signal (Set-point) | 0-10 V DC, 0-5 V DC, 4-20mA |
| Output Signal | 0-10 V DC, 0-5 V DC, 4-20mA |
| Dimensions | Please refer to the datasheet |
Download CMFC-9000 Series Coriolis Flow Controllers Datasheet Talk to one of our process control experts today at
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Download CMFC-9000 Series Coriolis Flow Controllers Datasheet
