Precision Sensors' high-purity pressure switches are considered "best-of-class" in the semiconductor equipment market. Designed specifically for the demanding requirements of semiconductor tool OEMs, they provide highly repeatable on-off switching for alarm, shutdown and interlock applications. Wetted surfaces are VIM - VAR 316L and are standardly 10 Ra or 5 Ra depending on the requirement. End connections include face-seal, flow-through and flush-type fittings. Set points can be gauge, absolute or vacuum - and cycle life can be over 1 million on-off cycles. Manufacturing of high-purity products is done in a clean-room environment.
The PV36W series vacuum high purity pressure switch offers accurate and repeatable switching for monitor/control and alarm/shut down protection. These units, designed specifically for high purity gas systems, are vented to ambient conditions for sensing pressure below (vacuum) ambient.
Features
Features & Benefits
Key Features
- Highly accurate and repeatable switching for reliable process control
- Negative-rate Belleville spring design improves accuracy and extends service life
- Welded construction ensures leak-tight integrity in critical systems
- Factory-set, tamper-proof calibration eliminates field adjustment errors
- High-purity 316L stainless steel wetted surfaces support ultra-clean applications
- Cleanroom manufacturing maintains contamination control
- RoHS compliant design for environmental compliance
Customer Benefits
- Improved process reliability: Stable switching ensures consistent vacuum control
- Reduced maintenance: Welded design and minimal adjustment requirements lower service needs
- Enhanced system protection: Ideal for alarm and shutdown functions in sensitive systems
- Long operational life: Designed for millions of cycles in demanding applications
Specifications
Vacuum Pressure Switch PV36W Series Specifications:
| PV36W | |
| Available settings | 125 to 750 mm Hg VAC |
| Deadband | 40mm Hg + 6% of Setting |
| Repeatability | 15mm Hg + 2% of Setting |
| *Internal Volume | 1.06 CC |
| **Proof Pressure | 0 psia 25 psig |
| **Operating Temp. Range | 0 to 130 F |
| Finish | 5 Ra Typical |
| Wetted Materials | 316L per F20 |
| Media Connections | 1/4 end seal type |
| Electrical Connections | Free Leads or Crimp Type Connectors |
| Min. Operating Life | 5 Million cycles |
| Approvals | UL, CE, ISO 13849 |
| Warranty | 36 Months |
Applications
Applications & Industries
Typical Applications
- Semiconductor gas delivery and vacuum systems
- Process chamber vacuum monitoring
- Equipment interlocks and safety shutdown systems
- High-purity gas distribution systems
- OEM vacuum control systems
Industries Served
- Semiconductor manufacturing
- Electronics and microfabrication
- Chemical processing (high-purity gas applications)
- OEM equipment manufacturing
The PV36W Series excels in environments where vacuum accuracy, contamination control, and system protection are essential to process success.
Q & A
Vacuum Pressure Switch PV36W Series Q & A
Downloads
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