Parker Proflow™-HE Cartridge

Pleated Hydrophilic PTFE Membrane and Polypropylene Supported Cartridges for Microelectronic Liquid

The Proflow™-HE cartridge is designed for filtration of microelectronic (MiE) fluids. High-purity polypropylene and hydrophilic PTFE provide an economical alternative for the filtration of various MiE chemicals. The hydrophilic nature of the PTFE membrane does not require pre-wetting for aqueous based liquids typically necessitated with standard PTFE membranes. This can reduce total operating cost and improve process up-times.

Proflow™-HE is available in both Standard and SELECT pleated versions. SELECT pleating allows for additional membrane surface areas for exceptional flow rates and on-stream life.

Proflow™-HE cartridges are manufactured in an ISO 9008 certified Class 10,000 cleanroom and flushed with ultra-high-purity deionized water and 100% integrity tested as well as serialized to provide complete product purity, reliability and traceability.

Parker Proflow™-HE Cartridge Applications:

Recommended applications include, but are not limited to:
Acids & Bases
Extraction/crystallization solvents
Hot ultra-high-purity deionized water
Solvent filtration

Parker Proflow™-HE Cartridge Benefits:

Hydrophilic membrane (pre-wetting not required)
Broad chemical compatibility
Long service life minimizes changeout frequency
Low differential pressure reduces energy costs
Top-performing retention efficiency
Very low metals and organic extractables
Quick rinse up-time
Integrity-tested for quality assurance

Parker Proflow™-HE Cartridge Markets:

Proflow™-HE is well-suited for the manufacturing of:

LCD Displays
Solar Panels
Bulk Chemicals
Fine Chemical Filtration

Parker Proflow™-HE Cartridge Specifications:

Materials of Construction
Membrane:     Hydrophilic PTFE
Support layers:     Polypropylene
Structure:     Polypropylene

Materials are thermally bonded, for maximum assurance of filter integrity and elimination of bonding or sealing compounds. Modules and final filter assemblies are flushed with 18-meg-ohm-cm high purity water, to provide extremely low extractables levels.

Effective Filtration Area
Standard Pleating: 7.2 ft2*
SELECT Pleating: 11.4 ft2*
* Per 10-inch (250mm) cartridges

Maximum Differential Pressure
Forward:
70 psid (4.8 bar) @ 75°F (24°C)
40 psid (2.8 bar) @ 180°F (82°C)
Reverse:
40 psid (2.8 bar) @ 75°F (24°C)

Cleanliness (Particle Shedding)
20 gal rinse-up at 1gpm achieves <1 particle/ml @ 0.2 m

Chemical Compatibility
Compatible with many water based acids, basis & solvent solutions.
Contact dhP-N.A. Technical Services for details.