Highest-Performance All-Fluoropolymer Capsule for the Most Aggressive Applications
The Fluorocap®-XL encapsulated filter cartridge is setting the new standard for exceptional fow rates and on-stream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases filtration area by over 70%. This results in increased bath turnover and longer filter life to meet the demands of todays advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which of the lowest metals extractables in the industry.
Parker Fluorocap®-XL Filter Capsule Benefits:
- Extra large filtration area for longer life
- Highest flow rates for maximum bath turn over
- Wet-pack option for quick installation
- Ultraclean option for absolute cleanliness
- All-fluoropolymer for maximum chemical resistance
- 100% integrity tested for consistent quality
Parker Fluorocap®-XL Filter Capsule Applications:
- Wet etch and clean
- Hot phosphoric acid
- Sulfuric acid
- Hydrofl uoric acid
- Nitric acid
- Piranha
- SC1, SC2
- NMP-based solvents
- Other high temperature or ozonated processes
Parker Fluorocap®-XL Filter Capsule Specifications:
Materials of Construction
100% Fluoropolymer construction. All components are thermally bonded to ensure integrity and reduce extractables.
Effective Filtration Area per 10 (250mm) Cartridge
22.5ft2 (2.04 m2) 0.03m
21.5ft2 (1.99 m2) 0.05m
18.5ft2 (1.71 m2) 0.10m
Metals Extractables*
Standard: <30ppb (total)
Ultraclean: <7ppb (total)
*In a 10% HNO3 extraction
Maximum Differential
Pressure/Temperature
Forward: 70psid (4.8bar) @ 75 °F (24 °C)
Standard: 50psid (3.4bar) @ 167 °F (75 °C)
15psid (1.0bar) @ 300 °F (150 °C)
Forward
HT option: 15psid (1.0bar) @ 356 °F (180 °C)
Reverse: 50psid (3.4bar) @ 75 °F (24 °C)
15psid (1.0bar) @ 250 °F (121 °C)
Cleanliness (particle shedding)
Wet-packed: <2 particles/ml >0.2m after 7gal @ 1gpm
TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed after 12gal @ 1gpm.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.
Download Fluorocap-XL Filter Capsule Datasheet
Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.
Highest-performance all-fluoropolymer capsule for the most aggressive applications