UE Precision Sensors worked with leading semiconductor manufacturer's to create state-of-the-art products that assist with contamination prevention and safety by monitoring pressure, flow, level and temperature at all times.
Safety does not happen by accident. UE Precision Sensors worked with leading semiconductor manufacturer's to create state-of-the-art products that assist with contamination prevention and safety by monitoring pressure, flow, level and temperature.EH&S - Personnel and Environment Safety
- Corrosive environment compatible
- Rugged and robust components
- Fail to safety
Case Study: Gas Cabinet and BCDS Risk of Harm
- Fab needs to detect any drift or exhaust failure
- Semi S6 Tracer gas testing: concentration >OEL/LEL
- Human and environment hazard protection
- Operators need to know that the tool is safe
- UL991/S2-0818 Safety Interlocks
- Fail to safety
Product Safety - Wafer Integrity Protection
- Analog design: No software
- >5 million life cycle warranty
- Best Stability: No drift!
Case Study: EFEM Operations Risk of Product Harm
- Monitoring continuous high positive differential pressure between EFEM enclosure and the clean room
- Prevent from getting contamination on wafers
- Insure mini-environment balancing and detect any FFU drift
- Prevent risks from clean room pressure fluctuation
- Fail safe always
Equipment Safety - Long-Term Protection of Complex Tools
- >200,000 hours MTBF
- Auto-diagnostic feature: S2/UL991
- Passive or analog: Bug free safe guards!
Low Pressure
- Smart sensor with auto diagnostic
- Ultimate safety for EHS
- 200,000 h/MTBF
- S2/UL991 certified
Low Pressure Monitor LDP ECHOLINE® Series [1]
Pressure Transducers
- High performance sensors
- 100 to 3,000 PSI ranges
- Compound available
- Absolute option
- 5 million life cycle
Temperature Sensors
- RTD: PT100/500/1000 temp. -128 to 204°C
- Bi-metallic temp. threshold temp. -55 to 176°C factory set
Pressure Switches
- Electro-mechanical technology
- Safety devices with factory-set set points
- Vacuum, absolute and gauge up to 375 bars
- Highly repeatable on-off alarms
Differential Pressure
- Electro-mechanical
- Variation detection of fixed difference
- Port 1: high purity gases or liquids
- Port 2: dry air or inert gases
- 5 Million Life Cycle
Flow Switches
- Magnetic detection
- Paddle or piston
- Reed contact
- Factory set
V12F Series Flow Switch [6]
Talk to one of our process control experts today at (855) 737-4714, or fill out our online form [7] to learn more.
Monday, June 22, 2020Semiconductor [8]Process Control [9]