Semi Fab Upgrades Gas Cabinet with Echoline to Prevent Costly Shutdowns

Gas Cabinet and BCDS

Risk of Harm

• Semiconductor Fab needs to detect any drift or exhaust failure
• Semi S6 Tracer gas testing: concentration >OEL/LEL
• Human and environment hazards protection
• Operators need to know that the tool is safe
• UL991/S2-0818 Safety interlocks
• Fail to safety

Key Safety Requirements
 

1. Stable monitoring (no drift)
2. Visual for the operator
3. Dry contacts + Analog output
4. Fail safe output: Interlock
5. Auto diagnostics
6. Time delay prevents shut down
7. Maintenance mode
8. Local/manual reset button
9. MTBF >200,000 hours

Industry Certifications 

• Semi S2-0200*
• UL991 compliant*
• UL508*
• EN61-326 EMI
• CE/RoHS certified
• ISO9001

* North America Requirements

Echoline Smart Sensor

Low Differential Pressure Monitoring 

• Sensitive down to 5 Pa
• High and low limits: Dry contact alarm #1
• Pressure display in Pa or IN. WC.
• Alarm status with Red/Green LEDs
• Pressure reading: 0-10 volts output
• Maintenance mode and reset button
   

Echo Circuit: Auto Diagnostic Feature 

• Fail safe/Dry contact alarm #2
• Temporarily span high and low settings to 5 and 95% range
• Avoids trips and downtime
• Analog electronics: No microcontroller. No bug: 100% safe!

2 Low Pressure Sensor Models Available

Echoline LDP 

• For corrosive media: from 0-500 Pa, up to 0-2,000 Pa
• For non-corrosive media: From 0-50 Pa, up to 0-2,000 Pa

LPS Series 

• From 0-50 Pa. up to 0-2,000 Pa

Takeaways
 

 Performance

• SMART sensor with auto diagnostic providing UL991 and S2 compliance
• Best stability: No drift
• 100% analog design: No bugs!
• MTBF >200,000 hours
   

Cost Competitive
 

• No need for redundancy
• No need for regular inspections
• Ships with the cabinet: No install labor at customer
• Prevents costly shutdowns
• Built in 3rd party safety certification

Call us today at (855) 737-4714 to learn more, or fill out our online form and someone will get back to you.