Introducing a new, competitively priced line of metal face seal and weld fittings from Parker, designed for ultra high purity (UHP) semiconductor applications such as manifold boxes, gas cabinets and tool hookup. SEMI F20-compliant and available in 316, 316L and 316L double-melt stainless steel, these new fittings feature permanent heat code marking on wetted components for material traceability. Plus, their compact design allows for system miniaturization and closecoupled spacing.
Ultra-High Purity (UHP) Metal Face Seal and Weld Fittings Material / Specification
Parker UHP face seal and weld fitting lines are manufactured from 316L stainless steel which meets specifications for chemical composition, and inclusion ratings as outlined in “Semi F20-0706: Specification for 316L Stainless Steel bar, forgings, extruded shapes, plate, and tubing for components used in general, high-purity, and ultra-high purity semiconductor manufacturing applications”. Nothing more – nothing less. In addition, the material will be post processed to assure proper surface chemistry and cleanliness levels as called out in Semi F60-0301 “Test Method for ESCA evaluation of surface composition of wetted surfaces of passivated 316L stainless steel components”, and Semi F19 “Specification for the surface condition of the wetted surfaces of stainless steel components”.
Ultra-High Purity (UHP) Metal Face Seal and Weld Fittings Material Options
The UHP face seal and weld fitting lines are offered in two different processing configurations: single melt (SSS) and double melt (SSD). Single melt material is produced to using either a vacuum induction melt (VIM) or argon oxygen decarburization (AOD) process as the minimum requirements. Double melt material combines either of the single melt methods with another melting process: vacuum arc re-melt (VAR) or electro slag re-melt (ESR). Both the single and double melt material grades meet Semi F20 chemical composition with single melt and double melt products having JK inclusion ratings of high purity and ultra-high purity respectively.
- Compact design allows system miniaturization and close coupled spacing
- Permanent heat-code marking for traceability
- Superior value to reduce short- and long-term costs
- SEMI F20 compliant
Applications: VMBs/CMBs, gas cabinets, and tool hookups.
Download Parker's UHP Metal Face Seal and Weld Fittings Datasheet Ultra-High Purity Fittings Cross Reference Guide
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Download Parker's UHP Metal Face Seal and Weld Fittings Datasheet
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