Safety does not happen by accident. UE Precision Sensors worked with leading semiconductor manufacturers to create state-of-the-art products that assist with contamination prevention and safety by monitoring pressure, flow, level, and temperature.
EH&S - Personnel and Environment Safety
EH&S Personnel and environment safety
- Corrosive environment compatible
- Rugged and robust components
- Fail to safety
Case Study: Gas Cabinet and BCDS Risk of Harm
- Fab needs to detect any drift or exhaust failure
- Semi S6 Tracer gas testing: concentration >OEL/LEL
- Human and environment hazard protection
- Operators need to know that the tool is safe
- UL991/S2-0818 Safety Interlocks
- Fail to safety
Product Safety - Wafer Integrity Protection
Product Safety - Wafer Integrity Protection
- Analog design: No software
- >5 million life cycle warranty
- Best Stability: No drift!
Case Study: EFEM Operations Risk of Product Harm
- Monitoring continuous high positive differential pressure between EFEM enclosure and the clean room
- Prevent from getting contamination on wafers
- Insure mini-environment balancing and detect any FFU drift
- Prevent risks from clean room pressure fluctuation
- Fail safe always
Equipment Safety - Long-Term Protection of Complex Tools
Equipment Safety - Long-Term Protection of Complex Tools
- >200,000 hours MTBF
- Auto-diagnostic feature: S2/UL991
- Passive or analog: Bug free safe guards!
Low Pressure Monitor LDP Echoline Series
Low Pressure
- Smart sensor with auto diagnostic
- Ultimate safety for EHS
- 200,000 h/MTBF
- S2/UL991 certified
Low Pressure Monitor LDP ECHOLINE® Series
Pressure Transducer Staset
Pressure Transducers
- High-performance sensors
- 100 to 3,000 PSI ranges
- Compound available
- Absolute option
- 5 million life cycle
Temperature Sensors
- RTD: PT100/500/1000 temp. -128 to 204°C
- Bi-metallic temp. threshold temp. -55 to 176°C factory set
UE-Precision-Sensors-Pressure-Switch-E36W
Pressure Switches
- Electro-mechanical technology
- Safety devices with factory-set set points
- Vacuum, absolute, and gauge up to 375 bars
- Highly repeatable on-off alarms
UE-Precision-Sensors-Differential-Pressure-Switch-D48W
Differential Pressure
- Electro-mechanical
- Variation detection of fixed difference
- Port 1: high purity gases or liquids
- Port 2: dry air or inert gases
- 5 Million Life Cycle
UE-Precision-Sensors-Flow-Switch-V12F
Flow Switches
- Magnetic detection
- Paddle or piston
- Reed contact
- Factory set
V12F Series Flow Switch
Talk to one of our process control experts today at (855) 737-4714, or fill out our online form to learn more.