Precision Sensors' Echoline Smart Sensor with auto diagnostic provides Semi Fabs with UL991 and S2 compliance and provides stability with no need for regular inspections.
Gas Cabinet and BCDS
Risk of Harm
- Semiconductor Fab needs to detect any drift or exhaust failure
- Semi S6 Tracer gas testing: concentration >OEL/LEL
- Human and environment hazards protection
- Operators need to know that the tool is safe
- UL991/S2-0818 Safety interlocks
- Fail to safety
Key Safety Requirements
- Stable monitoring (no drift)
- Visual for the operator
- Dry contacts + Analog output
- Fail safe output: Interlock
- Auto diagnostics
- Time delay prevents shut down
- Maintenance mode
- Local/manual reset button
- MTBF >200,000 hours
Industry Certifications
- Semi S2-0200*
- UL991 compliant*
- UL508*
- EN61-326 EMI
- CE/RoHS certified
- ISO9001
Echoline Smart Sensor
Low Differential Pressure Monitoring- Sensitive down to 5 Pa
- High and low limits: Dry contact alarm #1
- Pressure display in Pa or IN. WC.
- Alarm status with Red/Green LEDs
- Pressure reading: 0-10 volts output
- Maintenance mode and reset button
Echo Circuit: Auto Diagnostic Feature
- Fail safe/Dry contact alarm #2
- Temporarily span high and low settings to 5 and 95% range
- Avoids trips and downtime
- Analog electronics: No microcontroller. No bug: 100% safe!
2 Low Pressure Sensor Models Available
Echoline LDP [1]- For corrosive media: from 0-500 Pa, up to 0-2,000 Pa
- For non-corrosive media: From 0-50 Pa, up to 0-2,000 Pa
LPS Series [2]
- From 0-50 Pa. up to 0-2,000 Pa
Takeaways
Performance- SMART sensor with auto diagnostic providing UL991 and S2 compliance
- Best stability: No drift
- 100% analog design: No bugs!
- MTBF >200,000 hours
Cost Competitive
- No need for redundancy
- No need for regular inspections
- Ships with the cabinet: No install labor at customer
- Prevents costly shutdowns
- Built in 3rd party safety certification
Call us today at (855) 737-4714 to learn more, or fill out our online form [3]and someone will get back to you.Friday, January 29, 2021Semiconductor [4]Process Control [5]