POF115 Linear Stage from Primatics

POF115 Linear Stage from PrimaticsThe Primatics POF115 Open Frame XY Linear Stage is engineered for manufacturers and research organizations that demand exceptional positioning accuracy while maintaining unrestricted access to the work area. Its large open-frame design provides a generous center aperture, allowing imaging systems, optical paths, probes, lasers, and inspection equipment to access the payload from above and below simultaneously.

Unlike conventional XY stages, the POF115 combines a rigid, low-profile mechanical structure with direct-drive linear motor technology, enabling smooth, high-speed motion without the wear associated with mechanical drive components. Precision linear guide bearings and high-resolution linear encoders provide repeatable positioning for applications where micron-level accuracy directly impacts product quality and throughput.

An integrated cable management system keeps all axis wiring contained within the stage, reducing cable interference while improving reliability in demanding automation environments. The result is a compact, clean, and highly accurate motion platform well suited for semiconductor manufacturing, photonics, microscopy, metrology, life science automation, and precision assembly systems.

Features

POF115 Linear Stage Features

  • Designed for High-Precision Motion
    The POF115 was developed specifically for applications where positioning accuracy, repeatability, and accessibility are equally important.
  • Open Center Architecture
    The large center opening enables cameras, lasers, microscopes, sensors, vacuum fixtures, or illumination systems to access the workpiece from both directions. This makes the stage especially valuable in optical inspection, wafer processing, and advanced imaging systems.
  • Linear Motor Performance
    Brushless linear motors eliminate backlash, mechanical contact, and drivetrain wear commonly found in screw-driven stages. This provides smoother motion, faster acceleration, reduced maintenance, and longer operational life.
  • Exceptional Positioning Accuracy
    High-resolution linear encoders provide outstanding positioning accuracy and repeatability. Optional dual encoder configurations further improve system performance by minimizing alignment errors during demanding motion profiles.
  • Integrated Prima-Flex™ Cable Management
    Rather than requiring external cable carriers, the POF115 routes motion and feedback cables internally through Primatics' integrated cable management system. This simplifies machine design while reducing cable fatigue and interference.
  • Optimized for Precision Inspection
    The stage's rigid mechanical construction minimizes deflection while maintaining excellent flatness throughout travel. This is especially important for imaging systems, scanning applications, and precision metrology where even small mechanical deviations can affect measurement quality.
  • Cleanroom Compatibility
    Optional cleanroom preparation allows the POF115 to operate in environments where particle generation must be minimized, making it suitable for semiconductor, medical device, and life science manufacturing.

Specifications

POF115 Linear Stage Specifications

SpecificationValue
Product TypeOpen Frame XY Linear Stage
Drive TypeBrushless Linear Motor
Motion AxesX-Y
Maximum Travel300 mm × 300 mm
Maximum Load CapacityUp to 75 kg
Repeatability±0.5 μm
Accuracy±1.0 μm
Encoder ResolutionUp to 0.1 μm
Bearing SystemPrecision Linear Guide Bearings
Encoder OptionsSingle or Dual Linear Encoders
Cable ManagementIntegrated Prima-Flex™ System
Cleanroom OptionAvailable
Error MappingOptional
Typical ApplicationsInspection, Metrology, Microscopy, Wafer Processing, Precision Assembly

Applications

POF115 Linear Stage Applications

  • Wafer inspection systems
  • Semiconductor manufacturing equipment
  • Optical inspection systems
  • Machine vision platforms
  • Laser processing systems
  • Precision microscopy
  • Scientific imaging
  • Metrology equipment
  • Photonics alignment
  • Precision assembly automation
  • Probe stations
  • Surface scanning systems
  • Automated testing equipment
  • Life science instrumentation
  • Research laboratories

Q & A

POF115 Linear Stage Q & A

+What makes the Primatics POF115 different from a standard XY linear stage?
The POF115 features a large open-frame design that provides unobstructed access through the center of the stage. This allows optical systems, cameras, lasers, probes, and sensors to interact with the workpiece from above and below, making it ideal for inspection, imaging, and semiconductor applications.
+What types of applications are best suited for the POF115?
The POF115 is commonly used for wafer inspection, microscopy, laser processing, metrology, precision assembly, scientific research, photonics alignment, and automated optical inspection where extremely accurate planar motion is required.
+Why does the POF115 use linear motors instead of ball screws?
Linear motors eliminate backlash, reduce mechanical wear, provide smoother motion, and enable higher acceleration and faster positioning. They also require less maintenance than traditional screw-driven systems while delivering superior precision.
+Can the POF115 be integrated into cleanroom environments?
Yes. Cleanroom-prepared configurations are available for applications requiring low particle generation, including semiconductor fabrication, medical device manufacturing, and life science automation.
+Is the POF115 suitable for high-accuracy inspection systems?
Yes. With repeatability of ±0.5 μm, positioning accuracy of ±1.0 μm, high-resolution linear encoders, and optional dual encoder feedback, the POF115 is specifically designed for demanding inspection, metrology, and imaging applications where precision is critical.

Downloads

Download Primatics POF115 Linear Stage Datasheet

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