Parker Fluorocap®-XL Filter Capsule

Highest-Performance All-Fluoropolymer Capsule for the Most Aggressive Applications

The Fluorocap®-XL encapsulated filter cartridge is setting the new standard for exceptional fow rates and on-stream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases filtration area by over 70%. This results in increased bath turnover and longer filter life to meet the demands of today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which of the lowest metals extractables in the industry.


Benefits:

• Extra large filtration area for longer life
• Highest flow rates for maximum bath turn over
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality

Applications:

• Wet etch and clean
  • Hot phosphoric acid
  • Sulfuric acid
  • Hydrofl uoric acid
  • Nitric acid
  • Piranha
  • SC1, SC2
  • NMP-based solvents
• Other high temperature or ozonated processes

Specifications:

Materials of Construction
100% Fluoropolymer construction. All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area per 10˝ (250mm) Cartridge
22.5ft2 (2.04 m2) 0.03μm
21.5ft2 (1.99 m2) 0.05μm
18.5ft2 (1.71 m2) 0.10μm

Metals Extractables*
Standard:     <30ppb (total)
Ultraclean:     <7ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:     70psid (4.8bar) @ 75 ºF (24 °C)
Standard:    50psid (3.4bar) @ 167 ºF (75 °C)
                   15psid (1.0bar) @ 300 ºF (150 ºC)
Forward
HT option:     15psid (1.0bar) @ 356 ºF (180 ºC)
Reverse:     50psid (3.4bar) @ 75 ºF (24 ºC)
                  15psid (1.0bar) @ 250 ºF (121 ºC)

Cleanliness (particle shedding)
Wet-packed: <2 particles/ml >0.2μm after 7gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed after 12gal @ 1gpm.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.




Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.